United States Patent
US Patent 6841890: Wafer alignment mark for image processing…
US 6841890 · granted 2005-01-11
| Patent Number | 6841890 |
|---|---|
| Title | Wafer alignment mark for image processing including rectangular patterns, image processing alignment method and method of manufacturing semiconductor device |
| Filed | 2003-04-08 |
| Granted | 2005-01-11 |
| Inventor(s) | Masashi Fujimoto |
| Assignee | NEC Electronics Corp |
| CPC Classification | G03F9/7092, G03F9/00, G03F9/70 |
| Number of Claims | 2 |
Claims Summary
1. A wafer alignment mark for image processing, comprising:
a plurality of rectangular patterns provided in the wafer alignment mark,