United States Patent
US Patent 5373240: Hot-cathode ionization pressure gauge including a…
US 5373240 · granted 1994-12-13
| Patent Number | 5373240 |
|---|---|
| Title | Hot-cathode ionization pressure gauge including a sequence of electrodes arranged at a distance from one another in sequence along an axis |
| Filed | 1994-02-01 |
| Granted | 1994-12-13 |
| Inventor(s) | Haas Guenter |
| Assignee | Max Planck Gesellschaft zur Foerderung der Wissenschaften eV |
| CPC Classification | H01J41/00, G01L21/00, G01L21/32 |
| Number of Claims | 2 |
Abstract
A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis:
Claims Summary
1. A hot-cathode ionization pressure gauge having an electrode system which comprises the following electrodes, arranged at a distance from one another in the specified sequence along an axis (A):a) a thermionic cathode filament (10) which has a central active part (10a) and lateral support parts (10b, 10c);
Inventors
Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV