United States Patent
US Patent 7176046: Apparatus and a method of fabricating inversion…
US 7176046 · granted 2007-02-13
| Patent Number | 7176046 |
|---|---|
| Title | Apparatus and a method of fabricating inversion channel devices with precision gate doping for a monolithic integrated circuit |
| Filed | 2005-01-20 |
| Granted | 2007-02-13 |
| Inventor(s) | Geoff W. Taylor |
| Assignee | University of Connecticut |
| CPC Classification | H01S5/183, H01S5/00, H01S5/10 |
| Number of Claims | 1 |
Claims Summary
1. A method of generating a semiconductor device, comprising the steps of:
providing a substrate;