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Multilayer plastic substrates |
| RE40787 |
Multilayer plastic substrates
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| Patent Drawings: | |
| Inventor: |
Martin, et al. |
| Date Issued: |
June 23, 2009 |
| Application: |
10/889,640 |
| Filed: |
July 12, 2004 |
| Inventors: |
Martin; Peter M. (Kennewick, WA) Graff; Gordon L. (West Richland, WA) Gross; Mark E. (Pasco, WA) Hall; Michael G. (West Richland, WA) Mast; Eric S. (Richland, WA)
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| Assignee: |
Battelle Memorial Institute (Columbus, OH) |
| Primary Examiner: |
Cano; Milton I. |
| Assistant Examiner: |
Dicus; Tamra L. |
| Attorney Or Agent: |
Dinsmore & Shohl LLP |
| U.S. Class: |
428/412; 428/411.1; 428/421; 428/473.5; 428/474.4; 428/480 |
| Field Of Search: |
428/412; 428/411.1; 428/480; 428/473.5; 428/474.4; 428/421; 430/58 |
| International Class: |
B32B 27/36 |
| U.S Patent Documents: |
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| Foreign Patent Documents: |
704297; 2353506; 196 03 746; 696 15 510; 0 147 696; 0 299 753; 0 299 753; 0 340 935; 0 340 935; 0 390 540; 0 390 540; 0 468 440; 0 547 550; 0 547 550; 0 590 467; 0 590 467; 0 722 787; 0 722 787; 0 777 280; 0 777 280; 0 777 281; 0 787 824; 0 787 826; 0 787 826; 0 915 105; 0 916 394; 0 916 394; 0 931 850; 0 931 850; 0 977 469; 0 977 469; 1 021 070; 1127 381; 1 130 420; 1 278 244; 1 426 813; 1 514 317; 2 210 826; S63-96895; 63136316; 64-18441; S64-41192; 2-183230; 3-183759; 3-290375; 4-14440; 4-48515; 4-1440; H4-267097; 05-217158; 5-147678; H5-182759; 61-36159; 06158305; 61-79644; 6-234186; 07-074378; H07-147189; H7-192868; 8-72188; H8-171988; 8-179292; 08325713; 8-318590; 09059763; H9-132774; 09-161967; 9-161967; 9-201897; 09-232553; 10-725; 10-013083; 10-016150; H10-41067; 10-334744; 11-017106; 11-040344; 11-149826; 11-255923; 2000-058258; 2002/505969; 10312883; 2003/282239; 3579556; 2006-294780; WO 87/07848; WO 89/00337; WO 95/10117; WO 96/23217; WO 97/04885; WO 97/16053; WO 97/22631; WO 98/10116; WO 98/18852; WO 99/16557; WO 99/16931; WO 99/46120; WO 00/26973; WO 00/35603; WO 00/35604; WO 00/35993; WO 00/36661; WO 00/36665; 00/53423; WO 01 68360; WO 01/68360; WO 01/81649; WO 01/82336; WO 01/82389; WO 01/87825; WO 01/89006; WO 02/26973; WO 03/016589; WO 03/098716; WO 2004/006199; WO 2004/016992; WO 2004/070840; WO 2004/089620; 2004/112165; WO 2005/015655; WO 2005/045947; WO 2005/048368; 2005/050754; WO 2006/036492; 2008/140313; 2008/142645 |
| Other References: |
Clark I. Bright, et al., Transparent Barrier Coatings Based on ITO for Flexible Plastic Displays, Oct. 17-19, 1999, pp. 247-264, Tucson,Arizona. cited by other. Akedo et al., "LP-5: Lake-News Poster: Plasma-CVD SiNx/Plasma-Polymerized CNx:H Multi-layer Passivation Films for Organic Light Emmitting Diods", SID 03 Digest. cited by examiner. Chwang et al., "Thin Film encapsulated flexible organic electroluminescent displays", American Institute of Physics, 2003. cited by examiner. Notification of Transmittal of the International Search Report Or The Declaration, Mar. 3, 2000, PCT/US99/29853. cited by other. Graupner, W. et al.; "High Resolution Color Organic Light Emitting Diode Microdisplay Fabrication Method", SPIE Proceedings 4207; 11-19 (2000); pp. 1-9. cited by other. Norenberg, H. et al.; Comparative Study of Oxygen Permeation Through Polymers and Gas Barrier Films; Denver, Apr. 15-20, 2000; pp. 347-351; Society of Vacuum Coaters. cited by other. Yializis, A. et al.; Ultra High Barrier Films; Denver, Apr. 15-20, 2000; pp. 404-407; Society of Vacuum Coaters. cited by other. Mahon, J.K. et al.; Requirements of Flexible Substrates for Organic Light Emitting Devices in Flat Panel Display Applications; Society of Vacuum Coaters; 42.sup.nd Annual Technical Conference Proceedings; Apr. 1999; pp. 456-459. cited by other. Henry, B.M. et al.; Microstructural and Gas Barrier Properties of Transparent Aluminum Oxide and Indium Tim Oxide Films; Denver, Apr. 15-20, 2000; pp. 373-378; Society of Vacuum Coaters. cited by other. Affinito, J.D. et al.; Vacuum Deposited Polymer/metal Multilayer Films for Optical Applications; Paper No. C1.13; International Conference on Metallurgical Coatings; Apr. 15-21, 1995; pp. 1-14. cited by other. Affinito, J.D. et al.; Vacuum Deposition of Polymer Electrolytes On Flexible Substrates; The Ninth International Conference on Vacuum Web Coating; 1995; pp. 20-37. cited by other. Affinito, J.D. et al.; Vacuum Deposition of Polymer Electrolytes On Flexible Substrates; The Ninth International Conference on Vacuum Web Coating; 1995; pp. 0-16. cited by other. Affinito, J.D. et al.; Molecularly Doped Polymer Composite Films for Light Emitting Polymer Application Fabricated by the PML Process; 41.sup.st Technical Conference of the Society of Vacuum Coaters; Apr. 1998; pp. 220-225. cited by other. Affinito, J.D. et al., PML/Oxide/PML Barrier Layer Performance Differences Arising From Use OF UV Or Electron Beam Polymerization Of The PML Layers, SVC 40.sup.th Annual Technical Conference, Apr. 12-17, 1997, pp. 19-25. cited by other. Affinito, J.D. et al.; Polymer/Polymer, Polymer/Oxide, and Polymer/Metal Vacuum Deposited Interference Filters; Tenth International Vacuum Web Coating Conference; Nov. 1996; pp. 0-14. cited by other. Felts, J.T.; Transparent Barrier Coatings Update: Flexible Substrates; Society of Vacuum Coaters; 36.sup.th Annual Technical Conference Proceedings; Apr. 25-30, 1993; pp. 324-331. cited by other. Affinito, J.D. et al.; Ultra High Rate, Wide Area, Plasma Polymerized Films from High Molecular Weight/Low Vapor Pressure Liquid or Solid Monomer Precursors; 45.sup.th International Symposium of the American Vacuum Society; Nov. 2-6, 1998; pp. 0-26.cited by other. Tropsha et al.; Combinatorial Barrier Effect of the Multilayer SiOx Coatings on Polymer Substrates; 1997 Society of Vacuum Coaters; 40.sup.th Annual Technical Conference Proceedings; Apr. 12-17, 1997; pp. 64-69. cited by other. Tropsha et al., Activated Rate Theory Treatment of Oxygen and Water Transport through Silicon Oxide/Poly(ethylene terphthalate) Composite Barrier Structures; J. Phys. Chem B Mar. 1997; pp. 2259-2266. cited by other. Affinito, J.D. et al.; Vacuum Deposited Conductive Polymer Films; The Eleventh International Conference on Vacuum Web Coating; Nov. 9-11, 1997; pp. 0-12. cited by other. De Gryse, R. et al.; Sputtered Transparent Barrier Layers, Tenth International Conference on Vacuum Web Coating, Nov. 1996, pp. 190-198. cited by other. Hibino, N. et al.; Transparent Barrier A1.sub.20.sub.3 Coating By Activated Reactive Evaporation; Thirteenth International Conference on Vacuum Web Coating ; Oct. 17-19, 1999; pp. 234-245. cited by other. Kukla, R. et al.; Transparent Barrier Coatings with EB-Evaporation, an Update; Section Five; Transparent Barrier Coating Papers; Thirteenth International Conference on Vacuum Web Coating; Oct. 17-19, 1999; pp. 222-233. cited by other. Bright, Clark I.; Transparent Barrier Coatings Based on ITO for Flexible Plastic Displays; Thirteenth International Conference on Vacuum Web Coating; Oct. 17-19, 1999; pp. 247-255. cited by other. Henry, B.M. et al.; Microstructural Studies of Transparent Gas Barrier Coatings on Polymer Substrates; Thirteenth International Conference on Vacuum Web Coating; Oct. 17-19, 1999; pp. 265-273. cited by other. Affinito, J.D. et al.; Ultra High Rate, Wide Area, Plasma Polymerized Films from High Molecular Weight/Low Vapor Pressure Liquid or Liquid/Solid Suspension Monomer Precursors; MRS Conference; Nov. 29-Dec. 3, 1998; Paper No. Y12.1 cited by other. Affinito, J.D. et al., "Molecularly Doped Polymer Composite Films for Light Emitting Polymer Applications Fabricated by the PML Process" 41st Technical Conference of Society of Vacuum Coaters, Apr. 1998, pp. 1-6. cited by other. Affinito, J.D. et al., "Vacuum Deposition of Polymer Electrolytes on Flexible Substrates" The Ninth International Conference on Vacuum Web Coating, pp. 0-16. cited by other. Bunshah, R.F. et al., "Deposition Technologies for Films and Coatings" Noyes Publications, Park Ridge, New Jersey, 1982, p. 339. cited by other. Affinito, J.D., Energy Res. Abstr. 18(6), #17171, 1993. cited by other. Graupner, W. et al.; "High Resolution Color Organic Light Emitting Diode Microdisplay Fabrication Method", SPIE Proceedings, Nov. 6, 2000; pp. 11-19. cited by other. Czeremuszkin, G. et al.; Permeation Through Defects in Transparent Barrier Coated Plastic Films; 43rd Annual Technical Conference Proceedings; Apr. 15, 2000; pp. 408-413. cited by other. Affinito, J.D. et al.; Vacuum Deposited Conductive Polymer Films; The Eleventh International Conference on Vacuum Web Coatings, pp. 1-12. cited by other. Vossen, J.L. et al.; Thin Film Porcesses; Academic Press, 1978, Part II, Chapter II-1, Glow Dischareg Sputter Deposition, pp. 12-63; Part IV, Chapter IV-1 Plasma Deposition of Inorganic Compounds and Chapter IV-2 Glow Discharge Polymerization, pp.335-397. cited by other. Affinito, J.D. et al.; Ultra High Rate, Wide Area, Plasma Polymerized Films from High Molecular Weight/Low Vapor Pressure Liquid or Solid Monomer Precursors; 45th International Symposium of the American Vacuum Society; pp. 0-26. cited by other. G. Gustafason, et al.; Flexible light-emitting diodes made from soluble conducting polymers; Letters to Nature; vol. 357; Jun. 11, 1992; pp. 477-479. cited by other. Tropsha et al.; Combinatorial Barrier Effect of the Multilayer SiOx Coatings on Polymer Substrates; 1997 Society of Vacuum Coaters, 40th Annual Technical Conferences Proceedings; pp. 64-69. cited by other. Tropsha et al.; Activated Rate Theory Treatment of Oxygen and Water Transport through Silicon Oxide/Poly(ethylene terphthalate) Composite Barrier Structures; J. Phys. Chem B 1997 pp. 2259-2266. cited by other. F.M. Penning; Electrical Discharges in Gases; 1965; pp. 1-51; Gordon and Breach, Science Publishers, New York-London-Paris. cited by other. Affinito, J.D. et al.; High Rate Vacuum Deposition of Polymer Electrolytes; Journal Vacuum Science Technology A 14(3), May/Jun. 1996. cited by other. Affinito, J.D. et al.; Vacuum Deposited Polymer/metal Multilayer Films for Optical Applications; Paper No. C1.13; pp. 1-14. cited by other. Shi, M.K. et al.; Plasma treatment of PET and acrylic coating surfaces-I. In situ XPS measurements; Journal of Adhesion Science and Technology; Mar. 2000 14(12); pp. 1-8. cited by other. Affinito, J.D. et al.; Vacuum Deposition of Polymer Electrolytes On Flexible Substrates, The Ninth International Conference on Vacuum Web Coating; pp. 20-37. cited by other. Affinito, J.D. et al.; Ultrahigh Rate, Wide Area, Plasma Polymerized Films from High Molecular Weight/Low Vapor Pressure Liquid or Solid Monomer Precursors; Journal Vacuum Science Technology A 17(4); Jul./Aug. 1999; pp. 1974-1981; American VacuumSociety. cited by other. Shi, M.K. et al.; In situ and real-time monitoring of plasma-induced etching PET and acrylic films, Plasmas and Polymers; Dec. 1999, 494); pp. 1-25. cited by other. Affinito, J.D. et al.; Vacuum Deposited Conductive Polymer Films; The Eleventh International Conference on Vacuum Web Coating; pp. 0-12. cited by other. Affinito, J.D. et al.; Molecularly Doped Polymer Composit Films for Light Emitting Polymer Application Fabricated by the PML Process; 41st Technical Conference of the Society of Vacuum Coaters; 1998; pp. 220-225. cited by other. Afffinto, J.D. et al.;Polymer/polymer, Polymer/Oxide, and Polymer/Metal Vacuum Deposited Interference Filters; Tenth International Vacuum Web Coating Conference; pp. 0-14. cited by other. Affinto, J.D. et al.; Vacuum Deposited Polymer/Metal Multilayer Films for Optical Application; Thin Solid Films 270, 1995; pp. 43-48. cited by other. Felts, J.T.; Transparent Barrier Coatings Update: Flexible Substrates; pp. 324-331. cited by other. Mahon, J.K., et al.; Requirements of Flexible Substrates for Organic Light Emitting Devices in Flat Panel Display Applications, Society of Vacuum Coaters, 42nd Annual Technical Conference Proceedings, 1999, pp. 456-459. cited by other. Henry, B.M. et al.; Microstructural and Gas Barrier Properties of Transparent Aluminium Oxide and Indium Tin Oxide Films; 2000; pp. 373-378; Society of Vacuum Coaters. cited by other. Phillips, R.W.; Evaporated Dielectric Colorless Films on PET and Opp Exhibiting High Barriers Toward Moisture and Oxygen; Society of Vacuum Coaters; 36th Annual Technical Conference Proceedings; 1993; pp. 293-300. cited by other. Yamada, Y. et al.; The Properties of a New Transparent and Colorless Barrier Film; 1995; pp. 28-31; Society of Vacuum Coaters. cited by other. Chahroudi, D.; Transparent Glass Barrier Coatings for Flexible Film Packaging; 1991; pp. 130-133; Society of Vacuum Coaters. cited by other. Bright, Clark, I.; Transparent Barrier Coatings Based on ITo for Flexible Plastic Displays; pp. 247-255. cited by other. Henry, B.M. et al.; Microstructural Studies of Transparent Gas Barrier Coatings on Polymer Substates; pp. 265-273. cited by other. Hibino, N. et al.; Transparent Barrier Al/2O3 Coating By Activated Reactive Evaporation; pp. 234-245. cited by other. Kukla, R. et al.; Transparent Barrier Coatings with EB-Evaporation, an Update; Section Five; Transparent Barrier Coating Papers; pp. 222-233. cited by other. Krug, T. et al.; New Developments in Transparent Barrier Coatings; 1993; pp. 302-305; Society Vacuum Coaters. cited by other. Affinto, J.D. et al.; PML/Oxide/PML Barrier Layer Performance Differences Arising From Use Of UV or Electron Beam Polymerization of the PML Layers; Thin Solid Films; Elsevier Science S.A.; vol. 308-309; Oct. 31, 1997; pp. 19-25. cited by other. Affinito, J.D. et al.; A new method for fabricating transparent barrier layers, Thin Solid Films 290-291; 1996; pp. 63-67. cited by other. Affinito, J.D. et al.; Polymer-Oxide Transparent Barrier Layers; SVC 39th Annual Technical Conference; Vacuum Web Coating Session; 1996; pp. 392-397. cited by other. Hoffmann, G. et al.; Transparent Barrier Coatings by Reactive Evaporation; 1994; pp. 155-160; Society of Vacuum Coaters. cited by other. Norenberg, H. et al.; Comparative Study of Oxygen Permeation Through Polymers and Gas Barrier Films; 2000; pp. 347-351; Society of Vacuum Coaters. cited by other. Yializis, A. et al.; Ultra High Barrier Films; 2000; pp. 404-407; Society Vacuum Coaters. cited by other. Klemberg-Sapieha, J.E. et al.; Transparent Gas Barrier Coatings Produced by Dual-Frequency PECVD; 1993; pp. 445-449; Society of Vacuum Coaters. cited by other. Finson, E. et al.; Transparent SiO2 Barrier Coatings: Conversion and Production Status; 1994; pp. 139-143; Society of Vacuum Coaters. cited by other. Yializis, A. et al.; High Oxygen Barrier Polypropylene Films Using Transparent Acrylate-A2O3 and Opaque Al-Acrylate Coatings; 1995; pp. 95-102; Society of Vacuum Coaters. cited by other. Shaw, D.G. et al.; Use of Vapor Deposited Acrylate Coatings to Improve the Barrier Properties of MetalLized Film; 1994; pp. 240-244; Society of Vacuum Coaters. cited by other. Wong, F.L., et al., "Long-lifetime thin-film encapsulated organic light-emitting diodes," Journal of Applied Physics 104, pp. 014509-1-4 (2008). cited by other. |
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| Abstract: |
A multilayer plastic substrate. The substrate comprises a plurality of thin film layers of at least one polymer, the plurality of thin film layers being adjacent to one another and having sufficient strength to be self-supporting, wherein the multilayer plastic substrate has an average visible light transmittance of greater than about 80%. |
| Claim: |
What is claimed is:
1. A multilayer plastic substrate consisting essentially of: a plurality of flash evaporated thin film layers of at least one polymer, the plurality of thin film layers beingadjacent to one another and having sufficient strength to be self-supporting, wherein the multilayer plastic substrate has an average visible light transmittance of greater than about 80%, wherein the multilayer plastic substrate comprises at least about50 thin film layers, and wherein the multilayer plastic substrate has a surface roughness of less than about 10 nm.
2. The multilayer plastic substrate of claim 1 wherein the average visible light transmittance is greater than about 85%.
3. The multilayer plastic substrate of claim 1 wherein the average visible light transmittance is greater than about 90%.
4. The multi layer plastic substrate of claim 1 wherein the peak visible light transmittance is greater than about 85%.
5. The multilayer plastic substrate of claim 1 wherein the peak visible light transmittance is greater than about 90%.
6. The multilayer plastic substrate of claim 1, wherein the multilayer plastic substrate comprises at least about 100 thin film layers.
7. The multilayer plastic substrate of claim 6, wherein the multilayer plastic substrate comprises at least about 500 thin film layers.
8. The multilayer plastic substrate of claim 7, wherein the multilayer plastic substrate comprises at least about 1000 thin film layers.
9. The multilayer plastic substrate of claim 1, wherein the multilayer plastic substrate is at least about 0.001 inches thick.
10. The multilayer plastic substrate of claim 1, wherein the multilayer plastic substrate is at least about 0.004 inches thick.
11. The multilayer plastic substrate of claim 1, wherein each thin film layer is less than about 50 .mu.m thick.
12. The multilayer plastic substrate of claim 1, wherein each thin film layer is less than about 5 .mu.m thick.
13. The multilayer plastic substrate of claim 1, wherein each thin film layer is in the range of about 0.05 to about 2 .mu.m thick.
14. The multilayer plastic substrate of claim 1, wherein each thin film layer is in the range of about 0.2 to about 0.3 .mu.m.
15. The multilayer plastic substrate of claim 1, wherein the at least one polymer is selected from (meth)acrylates, polystyrenes, methyl styrene-containing polymers, fluorinated polymers, polycarbonates, polysulfones, polyethersulfones,polyimides, polyamides, and polyether naphthalenes, and combinations thereof.
16. The multilayer plastic substrate of claim 1, wherein the glass transition temperature of the at least one polymer is greater than about 150.degree. C.
17. The multilayer plastic substrate of claim 1, wherein the glass transition temperature of the at least one polymer is greater than about 200.degree. C.
18. The multilayer plastic substrate of claim 1, wherein the multilayer plastic substrate has a surface roughness of less than about 2 nm.
19. The multilayer plastic substrate of claim 1, wherein the multilayer plastic substrate has a refractive index of greater than about 1.5.
20. The multilayer plastic substrate of claim 1, wherein the multilayer plastic substrate has a refractive index of greater than about 1.4.
21. The multilayer plastic substrate of claim 1, wherein the multilayer plastic substrate is flexible.
22. The multilayer plastic substrate of claim 1, wherein the multilayer plastic substrate is rigid.
23. The multilayer plastic substrate of claim 1, wherein the multilayer plastic substrate has a surface roughness of less than about 5 nm. |
| Description: |
BACKGROUND OF THE INVENTION
The present invention relates generally to plastic substrates which may be useful in products including, but not limited to, visual display devices, and more particularly to multilayer plastic substrates having improved light transmittance.
As used herein, the term "(meth)acrylic" is defined as "acrylic or methacrylic." Also, (meth)acrylate is defined as "acrylate or methacrylate."
As used herein, the term "average visible light transmittance" means the average light transmittance over the visible range from 400 to 800 nm.
As used herein, the term "peak visible light transmittance" means the peak light transmittance over the visible range from 400 to 800 nm.
As used herein, the term "polymer precursor" includes monomers, oligomers, and resins, and combinations thereof. As used herein, the term "monomer" is defined as a molecule of simple structure and low molecular weight that is capable ofcombining with a number of like or unlike molecules to form a polymer. Examples include, but are not limited to, simple acrylate molecules, for example, hexanedioldiacrylate, or tetraethyleneglycoldiacrylate, styrene, methyl styrene, and combinationsthereof. The molecular weight of monomers is generally less than 1000, while for fluorinated monomers, it is generally less than 2000. Monomers may be combined to form oligomers and resins but do not combine to form other monomers.
As used herein, the term "oligomer" is defined as a compound molecule of at least two monomers that maybe cured by radiation, such as ultraviolet, electron beam, or x-ray, glow discharge ionization, and spontaneous thermally induced curing. Oligomers include low molecular weight resins. Low molecular weight is defined herein as about 1000 to about 20,000 exclusive of fluorinated monomers. Oligomers are usually liquid or easily liquifiable. Oligomers do not combine to form monomers.
As used herein, the term "resin" is defined as a compound having a higher molecular weight (generally greater than 20,000) which is generally solid with no definite melting point. Examples include, but are not limited to, polystyrene resins,epoxy polyamine resins, phenolic resins, and acrylic resins (for example, polymethylmethacrylate), and combinations thereof.
There is a need for versatile visual display devices for electronic products of many different types. Although many current displays use glass substrates, manufacturers have attempted to produce commercial products, primarily liquid crystaldisplay devices, using unbreakable plastic substrates. These attempts have not been completely successful to date because of the quality, temperature, and permeation limitations of polymeric materials. Flexible plastic substrates, such as polyethyleneterephthalate (PET), polyethylene naphthalate (PEN), and polyether sulfone (PES), have been used in thicknesses from about 0.004 inches to 0.007 inches. However, the surface quality of these substrates is often poor, with the surface having largenumbers of scratches, digs, pits, and other defects.
In addition, many polymers exhibit poor oxygen and water vapor permeation resistance, often several orders of magnitude below what is required for product performance. For example, the oxygen transmission rates for materials such polyethyleneterephthalate (PET) are as high as 1550 cc/m.sup.2/day/micron of thickness (or 8.7 cc/m.sup.2/day for 7 mil thickness PET), and the water vapor transmission rates are also in this range. Certain display applications, such as those using organic lightemitting devices (OLEDs), require encapsulation that has a maximum oxygen transmission rate of 10.sup.-4 to 10.sup.-2 cc/m.sup.2/day, and a maximum water vapor transmission rate of 10.sup.-5 to 10.sup.-6 g/m.sup.2/day.
Barrier coatings have been applied to plastic substrates to decrease their gas and liquid permeability. Barrier coatings typically consist of single layer thin film inorganic materials, such as Al, SiO.sub.x, AlO.sub.x, and Si.sub.3N.sub.4vacuum deposited on polymeric substrates. A single layer coating on PET reduces oxygen permeability to levels of about 0.1 to 1.0 cc/m.sup.2/day, and water vapor permeability of about 0.1 to 1.0 g/m.sup.2/day. However, those levels are stillinsufficient for many display devices.
Additionally, many processes used in the manufacture of displays require relatively high temperatures that most polymer substrates cannot tolerate. For example, the recrystallization of amorphous Si to poly-Si in thin film transistors requiressubstrate temperatures of at least 160.degree.-250.degree. C., even with pulsed excimer laser anneals. The conductivity of a transparent electrode, which is typically made of indium tin oxide (ITO), is greatly improved if deposition occurs above220.degree. C. Polyimide curing generally requires temperatures of 250.degree. C. In addition, many of the photolithographic process steps for patterning electrodes are operated in excess of 120.degree. C. to enhance processing speeds in thefabrication. These processes are used extensively in the manufacture of display devices, and they have been optimized on glass and silicon substrates. The high temperatures needed for such processes can deform and damage a plastic substrate, andsubsequently destroy the display. If displays are to be manufactured on flexible plastic materials, the plastic must be able to withstand the necessary processing conditions, including high temperatures over 100.degree. C., harsh chemicals, andmechanical damage.
Thus, there is a need for an improved plastic substrate for visual display devices, and for a method of making such a substrate.
SUMMARY OF THE INVENTION
The present invention meets this need by providing a multilayer plastic substrate. The substrate consists essentially of a plurality of thin film layers of at least one polymer, the plurality of thin films layers being adjacent to one anotherand having sufficient strength to be self-supporting, wherein the multilayer plastic substrate has an average visible light transmittance of greater than about 80%. The average visible light transmittance is typically greater than about 85%, and it canbe greater than about 90%. The peak visible transmittance is typically greater than about 85% and it can be greater than about 90%.
There are typically at least about 50 thin film layers. The number of layers depends on the thickness of the thin film layers and the desired overall thickness of the multilayer plastic substrate. The multilayer plastic substrate is typicallyat least about 0.001 inches thick, and generally at least about 0.004 inches thick. Each thin film layer is typically less than about 50 .mu.m thick.
Polymers include, but are not limited to (meth)acrylate-containing polymers, styrene containing polymers, methyl styrene containing polymers, and fluorinated polymers, and combinations thereof. The glass transition temperature of the at leastone polymer is generally greater than about 150.degree. C., and it may be greater than about 200.degree. C.
The surface roughness of the multilayer plastic substrate is generally less than about 10 nm, and it may be less than about 5 nm, or less than about 2 nm.
The multilayer plastic substrate can have a refractive index of greater than about 1.4 or greater than about 1.5.
The multilayer plastic substrate can include additional layers, including, but not limited to, scratch resistant layers, antireflective coatings, antifingerprint coatings, antistatic coatings, conductive coatings, transparent conductive coatings,and barrier coatings, to provide functionality to the substrate if desired.
Another aspect of the invention involves a method of making the multilayer plastic substrate. The method includes providing a support, depositing a plurality of thin film layers of at least one polymer on the support so that the plurality ofthin film layers have sufficient strength to be self-supporting to form the multilayer substrate, and removing the support from the multilayer substrate, wherein the multilayer plastic substrate has an average visible light transmittance of greater thanabout 80%.
The thin film layers can be deposited in a vacuum. One example of a vacuum deposition process is flash evaporation. In this method, depositing the plurality of thin film layers includes flash evaporating a polymer precursor, condensing thepolymer precursor as a liquid film, and cross-linking the polymer precursor to form the polymer. The polymer precursor can be cross-linked by any suitable method, including, but not limited to, radiation curing, such as ultraviolet, electron beam, orx-ray, glow discharge ionization, and spontaneous thermally induced curing.
Alternatively, the plurality of thin film layers can be deposited by extruding or casting a layer of polymer precursor, and cross-linking the polymer precursor to form the polymer using any suitable cross-linking method.
Accordingly, it is an object of the present invention to provide an improved, multilayer plastic substrate and to provide a method of making such a substrate.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a cross-section of one embodiment of the substrate of the present invention.
DESCRIPTION OF THE INVENTION
FIG. 1 shows one embodiment of a multilayer plastic substrate of the present invention. The multilayer plastic substrate 100 is formed on a support 110. After the multilayer plastic substrate is formed, the support 110 is removed.
The multilayer plastic substrate of the present invention consists essentially of a plurality of thin film layers 120 of at least one polymer adjacent to one another. By adjacent, we mean next to, but not necessarily directly next to. In mostof the multilayer plastic substrate, the polymer thin film layers will be directly next to one another. However, there can be additional layers intervening between some adjacent layers in order to provide additional functionality to the multilayerplastic substrate, as shown in FIG. 1 and described below.
The plurality of thin film layers have sufficient strength to be self-supporting after they are formed. The exact number of thin film layers is not critical. It depends on the thickness of each of the individual thin film layers and the desiredoverall thickness of the multilayer plastic substrate. There must be enough thin film layers so that the plurality of thin film layers have sufficient strength to be self-supporting. As used herein, the term self-supporting means the substrate can behandled and processed without the need for an underlying support once the plurality of thin film layers have been deposited. There are typically at least about 50 thin film layers, more typically at least about 100 thin film layers. There are generallyin the range of about 500 thin film layers to about 1000 thin film layers or more. Each thin film layer is typically between about 0.05 to about 2 .mu.m thick, generally between about 0.2 to about 0.3 .mu.m. If the thin film layers are extruded, theyare usually thicker, typically up to about 50 .mu.m thick, in that case. The multilayer plastic substrate is typically at least about 0.001 inches thick, and generally at least about 0.004 inches thick. A 0.007 inch thick substrate would require about90 to 350 passes of the web past the polymer precursor sources. The multilayer plastic substrate can be flexible or rigid.
The average visible light transmittance of the multilayer plastic substrate is greater than about 80%, generally greater than 85%, and it may be greater than 90%. The peak visible light transmittance is generally greater than 85%, and it may begreater than 90%.
The at least one polymer can be any suitable polymer, including, but not limited to, polymers made from styrene polymer precursors, polymers made from methyl styrene polymer precursors, polymers made from (meth)acrylate polymer precursors, forexample, polymers made from hexanedioldiacrylate or tetraethyleneglycoldiacrylate polymer precursors, and fluorinated polymers, and combinations thereof. Polymers made from (meth)acrylate polymer precursors work well.
The multilayer plastic substrate can be flexible or rigid. Multilayer plastic substrates made from polymers including, but not limited to, (meth)acrylate polymer precursors will be flexible. One advantage of multilayer laminated materials isthat they typically have greater strength and flexibility than comparable single layer substrates. A multilayer plastic substrate of the present invention generally has hundreds of cross-linked layers that provide mechanical strength and sufficientrigidity to support the circuitry and devices on the display.
A multilayer plastic substrate made from (meth)acrylate polymer precursors will have excellent transmission at visible wavelengths. Because polymers made from (meth) acrylate polymer precursors have very low optical absorption, a multilayerplastic substrate made entirely from such polymers will have high optical transparency, typically an average visible light transmittance of greater than about 90%. Multilayer substrates made entirely from fluorinated polymers will also have an averagevisible light transmittance of greater than 90%. Substrates made from styrene and methyl styrene polymers would have an average visible light transmittance of about 89%.
The birefringence present in many flexible substrates can be reduced or eliminated with the present invention because the multilayer plastic substrate is not mechanically stressed during deposition.
Fully cured layers of polymers made from (meth)acrylate polymer precursors generally have a refractive index of greater than about 1.5, while fully cured fluorinated polymers generally have a refractive index of greater than about 1.4. Styrenecontaining polymers would have a refractive index of about 1.6.
Many optical applications, such as mirrors and reflectors, and display applications, such as organic light emitting devices, require substrates with a surface roughness of less than 2 nm. Surface roughness is the root mean square ofpeak-to-valley measurement over a specified distance, usually 1 nm. It can be measured using an atomic force microscope or back reflection distribution function. Many substrates do not have the necessary surface smoothness. For example, the surfaceroughness of PET is about 20-50 nm with 100 nm spikes. In contrast, flash evaporated polymer coatings have a very low surface roughness, generally less than about 10 nm, and it may be less than 5 nm, or less than about 2 nm. Surface roughness on theorder of 1 nm has been demonstrated. The surface of the multilayer plastic substrate is specular because of the exceptional smoothness of the polymer layers.
Because the polymer material is highly cross-linked, the multilayer plastic substrate can have a high glass transition temperature and excellent chemical resistance. The glass transition temperature of the at least one polymer is generallygreater than about 150.degree. C., and may be greatr than about 200.degree. C.
Polymers including, but not limited to, (meth)acrylates, polycarbonates, polysulfones, polyethersulfones, polymides, polyamides, and polyether napthteates have demonstrated excellent resistance to solvents. This provides protection fromprocessing chemicals, ultraviolet light exposure, and photoresists during lithography processes used to manufacture flat panel displays and their devices.
The thin film layers that form the multilayer substrate can be deposited by any suitable method, including vacuum flash evaporation, extrusion, or casting. With vacuum flash evaporation, deposition can be performed using a rotating drum or strapconfiguration. The polymer precursor is degassed and metered into a hot tube where it flash evaporates and exits through a nozzle as a polymer precursor gas.
The flash evaporating may be performed by supplying a continuous liquid flow of the polymer precursor into a vacuum environment at a temperature below both the decomposition temperature and the polymerization temperature of the polymer precursor,continuously atomizing the polymer precursor into a continuous flow of droplets, and continuously vaporizing the droplets by continuously contacting the droplets on a heated surface having a temperature at or above a boiling point of the liquid polymerprecursor, but below a pyrolysis temperature, forming the evaporate. The droplets typically range in size from about 1 micrometer to about 50 micrometers, by they could be smaller or larger.
Alteratively, the flash evaporating may be performed by supplying a continuous liquid flow of the polymer precursor into a vacuum environment at a temperature below both the decomposition temperature and the polymerization temperature of thepolymer precursor, and continuously directly vaporizing the liquid flow of the polymer precursor by continuously contacting the liquid polymer precursor on a heated surface having a temperature at or above the boiling point of the liquid polymerprecursor, but below the pyrolysis temperature, forming the evaporate. This may be done using the vaporizer disclosed in U.S. Pat. Nos. 5,402,314, 5,536,323, and 5,711,816, which are incorporated herein by reference.
The polymer precursor then condenses on the support as a liquid film which is subsequently cross-linked to form a polymer by any suitable method, including, but not limited to, radiation, such as ultraviolet, electron beam, or x-ray, glowdischarge ionization, and spontaneous thermally induced curing. This process is capable of depositing thousands of polymer layers at web speeds up to 100 m/min.
Alteratively, after degassing, the polymer precursor can be deposited by extruding, spraying, or casting layers of polymer precursor on the support. The polymer precursor is then cross-linked using any suitable method, such as those describedabove.
The functionality of the multilayer plastic substrate can be increased by the incorporation of functional layers 130, 140, and 150 during the deposition process. These functional layers 130, 140, and 150 can be deposited at any time during thedeposition process. They can be deposited below, 130, in between, 140, or on top of, 150, the plurality of thin film layers 120 of the multilayer plastic substrate, as shown in FIG. 1. As used herein, depositing a coating adjacent to the multilayerplastic substrate includes: depositing the coating on the top layer of the multilayer plastic coating; depositing the coating on the multilayer plastic substrate and then depositing additional layers of the multilayer plastic substrate over the coatingso that the coating is between the layers of the multilayer plastic substrate; and depositing the coating first and then depositing the layers of the multilayer plastic substrate, and combinations thereof. Functional layers 130, 140, and 150 include,but are not limited to, scratch resistant coatings, antirefelctive coatings, antifingerprint coatings, antistatic coatings, conductive coatings, transparent conductive coatings, and barrier coatings, and other functional layers. Depositing theseadditional layers allows the multilayer plastic substrate to be specifically tailored to different applications. Little or no surface modification is necessary for deposition of other layers because of the very smooth surface of the multilayer plasticsubstrate. Interfaces can be graded to bond all integrated functional layers firmly during the same coating run and pumpdown.
For some applications, it may be important that the presence of functional layers not reduce the average visible light transmittance below 80%, for others, not below 85%, and still others, not below 90%. In others, it may be important that thepeak visible light transmittance not drop below 85%, and for others, not below 90%. In others, it may be important that the functional layers not increase the surface roughness to greater than about 10 nm, for others, not greater than about 5 nm, andfor others, not greater than 2 nm.
One type of functional layer that can be included is a barrier coating. One example of a barrier coating is described in application Ser. No. 09/427,138, filed Oct. 25, 1999, entitled "Environmental Barrier Material for Organic Light EmittingDevice and Method of Making," which is incorporated herein by reference. The barrier coating can be a barrier stack having one or more barrier layers and one or more polymer layers. There could be one polymer layer and one barrier layer, there could beone or more polymer layers on one side of one or more barrier layers, or there could be one or more polymer layers on both sides of one or more barrier layers. The important feature is that the barrier stack have at least one polymer layer and at leastone barrier layer. The barrier layers and polymer layers in the barrier stack can be made of the same material or of a different material. The barrier layers are typically in the range of about 100-400 .ANG. thick, and the polymer layers are typicallyin the range of about 1000-10,000 .ANG. thick.
The number of barrier stacks is not limited. The number of barrier stacks needed depends on the material used for the polymer of the substrate and the level of permeation resistance needed for the particular application. One or two barrierstacks should provide sufficient barrier properties for some applications. The most stringent applications may require five or more barrier stacks.
The barrier layers should be transparent. Transparent barrier materials include, but are not limited to, metal oxides, metal nitrides, metal carbides, metal oxynitrides, metal oxyborides, and combinations thereof. The metal oxides include, butare not limited to, silicon oxide, aluminum oxide, titanium oxide, indium oxide, tin oxide, indium tin oxide, tantalum oxide, zirconium oxide, niobium oxide, and combinations thereof. The metal carbides include, but are not limited to, boron carbide,tungsten carbide, silicon carbide, and combinations thereof. The metal nitrides include, but are not limited to, aluminum nitride, silicon nitride, boron nitride, and combinations thereof. The metal oxynitrides include, but are not limited to, aluminumoxynitride, silicon oxynitride, boron oxynitride, and combinations thereof. The metal oxyborides include, but are not limited to, zirconium oxyboride, titanium oxyboride, and combinations thereof.
The polymer layers of the barrier stacks can be made from (meth)acrylate polymer precursors. The polymer layers in the barrier stacks can be the same or different.
The barrier stacks can be made by vacuum deposition. The barrier layer can be vacuum deposited onto, or into, the multilayer plastic substrate, or another functional layer. The polymer layer is then deposited on the barrier layer, preferably byflash evaporating (meth)acrylate polymer precursors, condensing on the barrier layer, and polymerizing in situ in a vacuum chamber. U.S. Pat. Nos. 5,440,446 and 5,725,909, which are incorporated herein by reference, describe methods of depositingthin film, barrier stacks.
Vacuum deposition includes flash evaporation of (meth) acrylate polymer precursors with in situ polymerization under vacuum, plasma deposition and polymerization of (meth)acrylate polymer precursors, as well as vacuum deposition of the barrierlayers by sputtering, chemical vapor deposition, plasma enhanced chemical vapor deposition, evaporation, sublimation, electron cyclotron resonance-plasma enhanced vapor deposition (ECR-PECVD), and combinations thereof.
In order to protect the integrity of the barrier layer, the formation of defects and/or microcracks in the deposited layer subsequent to deposition and prior to downstream processing should be avoided. The multilayer plastic substrate ispreferably manufactured so that the barrier layers are not directly contacted by any equipment, such as rollers in a web coating system, to avoid defects that may be caused by abrasion over a roll or roller. This can be accomplished by designing thedeposition system such that the barrier layers are always covered by polymer layers prior to contacting or touching any handling equipment.
While certain representative embodiments and details have been shown for purposes of illustrating the invention, it will be apparent to those skilled in the art that various changes in the compositions and methods disclosed herein may be madewithout departing from the scope of the invention, which is defined in the appended claims.
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