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Wafer boat
D378675 Wafer boat
Patent Drawings:Drawing: D378675-10    Drawing: D378675-11    Drawing: D378675-2    Drawing: D378675-3    Drawing: D378675-4    Drawing: D378675-5    Drawing: D378675-6    Drawing: D378675-7    Drawing: D378675-8    Drawing: D378675-9    
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(10 images)

Inventor: Iwai
Date Issued: April 1, 1997
Application: D/047,279
Filed: November 30, 1995
Inventors: Iwai; Hiroyuki (Kanagawa-ken, JP)
Assignee: Tokyo Electron Limited (Tokyo-to, JP)
Primary Examiner: Davis; Antoine Duval
Assistant Examiner:
Attorney Or Agent: Ladas & Parry
U.S. Class: D13/182
Field Of Search: D13/182; D6/396; D6/405; D6/407; D6/607; D6/626; D6/629; D6/630; D6/462; D6/466; D6/467; D6/468; D6/477; D6/478; D6/479; D14/120; D14/121; D15/140; 118/500; 118/715; 118/728; 206/454; 211/41; 414/935; 432/152
International Class:
U.S Patent Documents: D366868; 5482559; 5510146
Foreign Patent Documents:
Other References:









Abstract:
Claim: The ornamental design for wafer boat, as shown and described.
Description: FIG. 1 is a front view of a first embodiment of a wafer boat showing my new design;

FIG. 2 is a rear view of the embodiment of FIG. 1;

FIG. 3 is a top view of the embodiment of FIG. 1;

FIG. 4 is a bottom view of the embodiment of FIG. 1;

FIG. 5 is a left side view of the embodiment of FIG. 1, the right side view being a mirror image and, therefore, not shown;

FIG. 6 is a cross sectional view of the embodiment of FIG. 1 on section line 6--6 in FIG. 1;

FIG. 7 is a cross sectional view of the embodiment of FIG. 1 on section line 7--7 in FIG. 3;

FIG. 8 is a front/top/right side perspective view of the embodiment of FIG. 1;

FIG. 9 is a front view of a second embodiment of a wafer boat showing my new design;

FIG. 10 is a rear view of the embodiment of FIG. 9;

FIG. 11 is a top view of the embodiment of FIG. 9;

FIG. 12 is a bottom view of the embodiment of FIG. 9;

FIG. 13 is a left side view of the embodiment of FIG. 9, the right side view being a mirror image and, therefore, not shown;

FIG. 14 is a cross sectional view of the embodiment of FIG. 9 on section line 14--14 in FIG. 9;

FIG. 15 is a cross sectional view of the embodiment of FIG. 9 on section line 15--15 in FIG. 11; and,

FIG. 16 is a front/top/right side perspective view of the embodiment of FIG. 9.

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