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Hendrik t Lam Patents
Inventor:
t Lam; Hendrik
Address:
Eindhoven, NL
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
4712205 Opto-electronic focussing-error detection system with a compound wedge beam splitter December 8, 1987
An opto-electronic focussing-error detection system is described for detecting a deviation between a radiation-reflecting surface and a plane of focussing of an objective system in an optical imaging system. The detection system comprises a beam-splitting element and a radiation-sens


 
 
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