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Weijie Zheng Patents
Inventor:
Zheng; Weijie
Address:
San Diego, CA
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7277464 Method and apparatus for controlling the output of a gas discharge laser system October 2, 2007
The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.


 
 
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