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Shoaib H. Zaidi Patents
Inventor:
Zaidi; Shoaib H.
Address:
Poughkeepsie, NY
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
6954002 System and method of enhancing alignment marks October 11, 2005
A semiconductor wafer comprises a semiconductor substrate, a surface alignment mark visible on the semiconductor surface and a plurality of nanostructures on the surface of the surface alignment mark having an average pitch adapted to reduce reflectivity of the surface alignment mark


 
 
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