| |
 |
Shoaib H. Zaidi Patents |
|
Inventor: Zaidi; Shoaib H.
Address: Poughkeepsie, NY
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6954002 |
System and method of enhancing alignment marks |
October 11, 2005 |
| A semiconductor wafer comprises a semiconductor substrate, a surface alignment mark visible on the semiconductor surface and a plurality of nanostructures on the surface of the surface alignment mark having an average pitch adapted to reduce reflectivity of the surface alignment mark |
|
|
|