| Patent Number |
Title Of Patent |
Date Issued |
| 7327439 |
Lithographic apparatus and device manufacturing method |
February 5, 2008 |
| A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to condition a radiation beam, and an article support configured to support an article to be placed in a beam path of the radiation beam. The article support includes a plurality of bonded l |
| 7327438 |
Lithographic apparatus and method of a manufacturing device |
February 5, 2008 |
| A lithographic projection apparatus having a radiation system for providing a projection beam of radiation; a support structure for supporting a patterning device, the patterning device serving to pattern the projection beam according to a desired pattern; a substrate holder for hold |
| 7327437 |
Lithographic apparatus and device manufacturing method |
February 5, 2008 |
| A lithographic apparatus includes an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, |
| 7239368 |
Using unflatness information of the substrate table or mask table for decreasing overlay |
July 3, 2007 |
| A lithographic system includes an illumination system for providing a projection beam of radiation, a mask table for supporting a mask, the mask serving to impart the projection beam with a pattern in its cross-section, a substrate table for holding a substrate, and a projection syst |
| 7230254 |
Movable carriage for a lithographic apparatus and device manufacturing method |
June 12, 2007 |
| A movable carriage for moving an article support member in a lithographic apparatus is provided. The article support member is constructed and arranged to move and support an article to be placed in a beam path of the lithographic apparatus. The carriage includes a compartmented comp |
| 7227619 |
Lithographic apparatus and device manufacturing method |
June 5, 2007 |
| A burl plate for use in immersion lithography has a higher burl density in a peripheral portion than in a medial portion so that when a higher pressure differential is applied in the peripheral portion the compression of the burls in the peripheral portion is substantially the same a |
| 7187433 |
Electrostatic clamp assembly for a lithographic apparatus |
March 6, 2007 |
| An electrostatic clamp assembly for a lithographic apparatus is provided. The clamp assembly includes an electrostatic clamp structured to clamp an article against an article support structure during projection of a beam of radiation, and a controller structured to control at least one o |
| 7161662 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
January 9, 2007 |
| A lithographic projection apparatus includes a radiation system for providing a beam of radiation, and a substrate holder. The substrate holder includes a plurality of protrusions for providing a substantially flat plane of support for supporting a substrate in a beam path of the bea |
| 7133120 |
Lithographic apparatus, article support member, and method |
November 7, 2006 |
| A lithographic apparatus having an illumination system for providing a projection beam of radiation; an article support member for supporting an article to be placed in a beam path of the projection beam of radiation on the article support; and a clamp for providing a clamping pressure f |
| 7119885 |
Lithographic apparatus and device manufacturing method |
October 10, 2006 |
| A lithographic apparatus is disclosed. The apparatus includes an illumination system for conditioning a beam of radiation, and an article support for supporting a substantially flat article to be placed in the beam of radiation. The article support includes a plurality of supporting |
| 7113262 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
September 26, 2006 |
| A lithographic projection apparatus is disclosed. The apparatus includes a radiation system for providing a beam of radiation and a substrate holder for supporting a substrate to be placed in a beam path of the beam of radiation. The substrate holder includes a plurality of first pro |
| 7110091 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
September 19, 2006 |
| A lithographic projection apparatus is disclosed. The apparatus includes an illuminator for conditioning a beam of radiation, and an article holder. The article holder includes a plurality of protrusions arranged to provide a substantially flat plane of support for supporting an arti |
| 7110085 |
Lithographic apparatus, substrate holder and method of manufacturing |
September 19, 2006 |
| A lithographic projection apparatus including a radiation system for providing a projection beam of radiation; a support structure for supporting a patterning device, the patterning device serving to pattern the projection beam according to a desired pattern; a substrate holder havin |
| 7027132 |
Lithographic apparatus and device manufacturing method |
April 11, 2006 |
| A lithographic apparatus includes an article support for supporting a substantially flat article to be placed in a beam path of a beam of radiation. The article support includes a plurality of supporting protrusions that define a support zone for providing a plane of support. A backf |
| 7019820 |
Lithographic apparatus and device manufacturing method |
March 28, 2006 |
| A lithographic apparatus includes an illumination system for providing a beam of radiation and an article support for supporting an article to be placed in a beam path of the beam of radiation on the article support. The article support has a plurality of supporting protrusions. The |
| 7019816 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
March 28, 2006 |
| A lithographic apparatus is disclosed. The apparatus includes an illumination system to provide a beam of radiation, an article support to support an article to be placed in a beam path of the beam of radiation, and a clamp to clamp the article to the article support. The clamp is pr |
| 6897945 |
Lithographic apparatus and device manufacturing method |
May 24, 2005 |
| A lithographic apparatus includes an illumination system for providing a beam of radiation, an article support for supporting a flat article to be placed in a beam path of the beam of radiation on the article support, a backfill gas feed arranged in the article support for feeding backfi |
