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Koen J J M Zaal Patents
Inventor:
Zaal; Koen J J M
Address:
Eindhoven, NL
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7012264 Lithographic apparatus and device manufacturing method March 14, 2006
A lithographic apparatus is provided. The apparatus includes an illumination system that conditions a beam of radiation, an article support member that supports an article to be placed in a beam path of the beam of radiation on the article support, and a movable carriage for moving t


 
 
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