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Lee-Forng Yen Patents |
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Inventor: Yen; Lee-Forng
Address: Chang-Hua, TW
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6463806 |
Installation for measuring pressure inside vacuum pipeline |
October 15, 2002 |
| An installation for measuring pressure along a pipeline. The installation includes a control valve between a vacuum gauge and a pipe section attached to the pipeline. Relying on open and close signals from a main valve, the control valve is opened and closed accordingly. The control |
| 6357280 |
Leakage testing tool for a bellow of a semiconductor manufacturing machine |
March 19, 2002 |
| The invention is a leakage testing tool for a bellow of a semiconductor manufacturing machine. The testing tool has a plate, a first rack and an opposite second rack, both racks formed on the plate and supporting the bellow. Two movable plates each engage with a respective one of two |
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