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Chun Chun Yeh Patents |
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Inventor: Yeh; Chun Chun
Address: Hsin-Chu, TW
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6784077 |
Shallow trench isolation process |
August 31, 2004 |
| A method of forming a silicon oxide, shallow trench isolation (STI) region, featuring a silicon rich, silicon oxide layer used to protect the STI region from a subsequent wet etch procedure, has been developed. The method features depositing a silicon oxide layer via PECVD procedures, |
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