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Yuuji Yada Patents |
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Inventor: Yada; Yuuji
Address: Tokyo, JP
No. of patents: 4
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7335457 |
Positive-tone radiation-sensitive resin composition |
February 26, 2008 |
| A positive-tone radiation-sensitive resin composition containing an anthracene-based carboxylic acid component with low sublimation properties and excellent compatibility with other components is provided. The composition exhibits optimum controllability of radiation transmittance as |
| 6898229 |
Gas circulation fan for excimer laser apparatus |
May 24, 2005 |
| In a gas circulation fan, a main shaft is supported in a non-contact manner, by magnetic bearings. Between each of the magnetic bearings and a controller, a relay is provided. Each relay includes a position detection sensor circuit, an offset adjuster, a feedback gain adjuster and a filt |
| 6813301 |
Structure of reflux fan for excimer laser apparatus |
November 2, 2004 |
| First and second radial magnetic bearings are provided at opposing ends of a rotary shaft, first and second protective bearings are arranged in the vicinity thereof, a third radial magnetic bearing is arranged on a side of a fan near a motor, and by the third radial magnetic bearing, neg |
| 6490304 |
Excimer laser device |
December 3, 2002 |
| When an excimer laser device is stopped from operating, an alternating current is applied to a coil of an electromagnet of a magnetic bearing for a fan so as to erase a residual magnetic field and thus weaken the adhesiveness of dust to the electromagnet. A dust sucking unit sucks to |
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