| Patent Number |
Title Of Patent |
Date Issued |
| 6168311 |
System and method for optically determining the temperature of a test object |
January 2, 2001 |
| A system and method are disclosed for optically measuring the temperature of a packaged integrated circuit (IC). A light beam is focused inside the IC package onto a region of the integrated circuit whose temperature is to be measured. The through-substrate reflectivity of the IC, which |
| 5537247 |
Single aperture confocal imaging system |
July 16, 1996 |
| A confocal scanning imaging system utilizes only one aperture for both the incident light from the light source and return light from the object. To improve its performance, the aperture plate is tilted with respect to the incident light path, the surfaces are coated with anti-reflection |
| 4927254 |
Scanning confocal optical microscope including an angled apertured rotating disc placed between |
May 22, 1990 |
| A scanning confocal optical microscope using a Nipkow disc having a plurality of pinholes to project light and an objective lens to receive the light and illuminate points on an object to be viewed. Rotation of the disc scans the points across the object. The object is viewed by viewing |