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Thomas E. Wade Patents |
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Inventor: Wade; Thomas E.
Address: Tampa, FL
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6780755 |
Gas dome dielectric system for ULSI interconnects |
August 24, 2004 |
| A method of forming a multilevel conductor structure for ULSI circuits is provided. The structure includes a substrate having a plurality of dielectric supports extending from the substrate to support conductor layers. A removable material is deposited progressively on the substrate. |
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