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Thomas E. Wade Patents
Inventor:
Wade; Thomas E.
Address:
Tampa, FL
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
6780755 Gas dome dielectric system for ULSI interconnects August 24, 2004
A method of forming a multilevel conductor structure for ULSI circuits is provided. The structure includes a substrate having a plurality of dielectric supports extending from the substrate to support conductor layers. A removable material is deposited progressively on the substrate.


 
 
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