| Patent Number |
Title Of Patent |
Date Issued |
| 6907058 |
Energy monitor for molecular fluorine laser |
June 14, 2005 |
| A beam parameter monitoring unit for coupling with a molecular fluorine (F.sub.2) or ArF laser resonator that produces an output beam having a wavelength below 200 nm includes a detector and a beam path enclosure. The unit may also include a beam splitter within the enclosure for separat |
| 6868106 |
Resonator optics for high power UV lasers |
March 15, 2005 |
| An excimer or molecular fluorine laser system includes a discharge chamber filled with a laser gas mixture at least including a halogen-containing molecular species and a buffer gas, multiple electrodes within the discharge chamber connected to a discharge circuit for energizing the gas |
| 6819698 |
Energy monitor for F2 molecular fluorine laser and method of energy stabilization |
November 16, 2004 |
| A molecular fluorine (F.sub.2) laser system that includes a gaseous molecular fluorine gain medium contained in a laser tube, a resonant cavity, a power supply for exciting the gain medium to produce a laser beam having an ultra violet (UV) radiation output at substantially 157 nm an |
| 6763048 |
Line narrowing of molecular fluorine laser emission |
July 13, 2004 |
| A molecular fluorine laser system includes a discharge tube filled with a gas mixture including molecular fluorine and at least one buffer gas and having a total pressure of less than substantially 2500 mbar, multiple electrodes within the discharge tube, a pulsed discharge circuit conne |
| 6624424 |
VUV laser beam characterization system |
September 23, 2003 |
| A beam characterization monitoring apparatus receives an input VUV beam and measures a beam profile characteristic of the beam. An enclosure has an interior substantially free of VUV photoabsorbing species and configured for receiving the input VUV beam therein. Optics within the enclosu |
| 6608848 |
Method and apparatus for wavelength calibration |
August 19, 2003 |
| A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunab |
| 6577663 |
Narrow bandwidth oscillator-amplifier system |
June 10, 2003 |
| A molecular fluorine (F.sub.2) laser system includes a seed oscillator and power amplifier. The seed oscillator includes a laser tube including multiple electrodes therein which are connected to a discharge circuit. The laser tube is part of an optical resonator for generating a laser be |
| 6490307 |
Method and procedure to automatically stabilize excimer laser output parameters |
December 3, 2002 |
| A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provid |
| 6272158 |
Method and apparatus for wavelength calibration |
August 7, 2001 |
| A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunab |
| 6160832 |
Method and apparatus for wavelength calibration |
December 12, 2000 |
| A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunab |
| 5835647 |
Device for generating a laser beam having a homogenized cross section and use of this beam |
November 10, 1998 |
| A device designed for generating a laser beam having a homogenized cross section has the following features:a) a pulsed solid-state laser with an emission in a wavelength range of between 2 and 3 .mu.m,b) a pulse energy of between 100 .mu.J and 1 J,c) a transmission fiber made of a material |
