| Patent Number |
Title Of Patent |
Date Issued |
| 6897615 |
Plasma process and apparatus |
May 24, 2005 |
| An apparatus and process for enhancing the ignition of a gas to form a plasma in a plasma tool. The apparatus and process includes the use of a plasma tube to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or |
| 6628079 |
Lamp utilizing fiber for enhanced starting field |
September 30, 2003 |
| A discharge lamp bulb includes a light transmissive envelope and at least one conductive fiber disposed on a wall of the envelope, where the fiber has a thickness of less than 100 microns. The lamp may be either electrodeless or may include internal electrodes. Suitable materials for |
| 6465959 |
Method and apparatus for improved electrodeless lamp screen |
October 15, 2002 |
| A screen (49) including mesh portions (47 and 48) for a discharge lamp (46) bears a protective coating which inhibits degradation of the screen under lamp operating conditions. The coating does not absorb microwave energy, is transparent or reflective to visible light, and is capable of |
| 6072268 |
Lamp apparatus and method for re-using waste light |
June 6, 2000 |
| The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp whi |
| 6020676 |
Lamp with light reflection back into bulb |
February 1, 2000 |
| The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp whi |
| 5977724 |
Bulb rotation for eliminating partial discharges |
November 2, 1999 |
| The envelope of an electrodeless lamp which would tend to produce a discharge which does not substantially fill the interior of the envelope if the envelope is not rotated or is rotated at insufficient speed, is rotated at a high enough speed to cause the discharge to substantially f |
| 5866990 |
Microwave lamp with multi-purpose rotary motor |
February 2, 1999 |
| In a microwave powered electrodeless lamp, a single rotary motor is used to a) rotate the bulb and b) provide rotary motion to a blower or pump means for providing cooling fluid to the magnetron and/or to a forced gas cooling for providing cooler gas to the bulb. The blower may consist o |
| 5866980 |
Sulfur/selenium lamp with improved characteristics |
February 2, 1999 |
| The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp whi |
| 5834895 |
Visible lamp including selenium |
November 10, 1998 |
| A lamp for emitting in the visible portion of the spectrum, which utilizes a fill which includes a selenium and/or a sulfur containing substance. The lamp has superior performance characteristics, including long lifetime and excellent color rendition. The bulb may be either electrodeless |
| 5831386 |
Electrodeless lamp with improved efficacy |
November 3, 1998 |
| A sulfur, selenium, and/or tellurium based lamp for providing visible light. The lamp is operated in a regime for providing high efficacy wherein the ratio of the volume to surface area of the bulb is greater than 0.45 cm, the concentration of the sulfur, selenium, or tellurium is le |
| 5804922 |
Lamp with controllable spectral output |
September 8, 1998 |
| The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp whi |
| 5798611 |
Lamp having controllable spectrum |
August 25, 1998 |
| The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp whi |
| 5773918 |
Lamp with light reflection back into bulb |
June 30, 1998 |
| The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp whi |
| 5757130 |
Lamp with electrodes for increased longevity |
May 26, 1998 |
| A lamp for emitting in the visible portion of the spectrum, which utilizes a fill which includes a selenium and/or a sulfur containing substance. The lamp has superior performance characteristics. Special electrode structures are provided which enhance longevity. |
| 5682080 |
Method and apparatus for igniting electrodeless lamp discharge |
October 28, 1997 |
| Ignition of an electrodeless lamp, energized by microwave or radio frequency energy, is achieved by disposing an additive material in the lamp envelope along with the primary fill material. In a first embodiment, the additive is at least partially electrically conductive at room temp |
| 5670842 |
Method and apparatus for igniting electroeless lamp discharge |
September 23, 1997 |
| Ignition of an electrodeless lamp, energized by microwave or radio energy, is achieved by disposing an additive material in the lamp envelope along with the primary fill material. In a first embodiment, the additive is at least partially electrically conductive at room temperatures but |
| 5606220 |
Visible lamp including selenium or sulfur |
February 25, 1997 |
| A lamp for providing visible light which utilizes a fill containing selenium and/or sulfur, or compounds of these substances. The lamp is excited such that the excited fill emits radiation from elemental selenium and/or elemental sulfur which is in a continuous band principally within |
| 5404076 |
Lamp including sulfur |
April 4, 1995 |
| A high power lamp which utilzes a lamp fill containing sulfur or selenium, or compounds of these substances. An electrodeless lamp utilizing such a fill at a pressure at least as high as 1 atmosphere is excited at a power density in excess of 50 watts/cc. An arc lamp utilizing the fill a |
| 5361274 |
Microwave discharge device with TM.sub.NMO cavity |
November 1, 1994 |
| A microwave powered discharge device which utilizes a TM.sub.NMO cavity. A conductive body is positioned at a null in a discharge device which utilizes a TM.sub.210 cavity to reduce direct coupling from the microwave coupling means, e.g., slot of the cavity. A plurality of TM.sub.110 |
| 5334913 |
Microwave powered lamp having a non-conductive reflector within the microwave cavity |
August 2, 1994 |
| A microwave-powered discharge lamp having a microwave cavity, a discharge lamp mounted within the cavity, a reflector for light emitted by the lamp mounted outside the cavity, and a non-conductive reflector mounted within the cavity for outwardly reflecting light emitted from the lamp. |
| 5247178 |
Method and apparatus for treating fluids by focusing reflected light on a thin fluid layer |
September 21, 1993 |
| Apparatus for treating a fluid by irradiating a thin film of the fluid with high intensity, concentrated light. The irradiation affects chemical physical or biological activity changes in the fluid. |
| 5171609 |
Fiber curing with fluid flow |
December 15, 1992 |
| An inert ultraviolet light reaction chamber is provided with a flow of liquid on its light transmitting wall surface. The fluid prevents the build up of light blocking deposits, controls the temperature, and filters out undesired portions of the spectrum. |
| 5118989 |
Surface discharge radiation source |
June 2, 1992 |
| A surface discharge excimer light source which employs a one sided cell wherein all electrodes and the dielectric are on one side of the discharge space. The light produced by the device is neither shadowed nor attenuated by an electrode, and the electrode temperatures can be closely con |
| 5051663 |
Electrodeless lamp with improved bulb mounting arrangement |
September 24, 1991 |
| An improved bulb mounting arrangement for an electrodeless lamp to prevent the bulb from rotating during lamp operation. The shape of the bulb mounting projection ends and the shape of the cavity side wall openings are arranged so as to cooperate with each other to preclude substantial |
| 4978891 |
Electrodeless lamp system with controllable spectral output |
December 18, 1990 |
| An electrodeless lamp system and method for providing light output having a controlled spectral distribution. A lamp having a fill which is not fully vaporized at the lamp operating temperature and which emits in a characteristic region of the spectrum is used. A function generator g |
| 4954755 |
Electrodeless lamp having hybrid cavity |
September 4, 1990 |
| A microwave powered electrodeless lamp which employs a hybrid cylindrical cavity which is part mesh and part solid. The cylindrical mesh portion permits the lamp to be used with an external reflector while the cylindrical solid portion enables a plurality of waveguides to be coupled |
| 4887192 |
Electrodeless lamp having compound resonant structure |
December 12, 1989 |
| An electrodeless lamp which couples to a small bulb and obtains a relatively high light output therefrom. A cavity which comprises a compound resonant structure including vestibule and reflector portions is provided. The combination of vestibule and reflector results in a condition o |
| 4885047 |
Apparatus for photoresist stripping |
December 5, 1989 |
| An apparatus for rapidly stripping a photoresist which utilizes an oxidizing fluid such as ozone. A very thin layer of oxidizing fluid of four millimeters or less is flowed over the photoresist. The fluid flows at high velocity over the resist, while the resist is heated. Additionall |
| 4868509 |
Method and apparatus for detecting magnetron power supply failure |
September 19, 1989 |
| A method and apparatus for detecting system failure in a magnetron power supply circuit. The apparatus is capable of providing an indication as to whether it is the power supply or the magnetron which has failed. A dual half wave doubler power supply circuit is provided and the currents |
| 4859906 |
Deep UV lamp bulb with improved fill |
August 22, 1989 |
| An electrodeless lamp bulb comprises of a quartz envelope and a fill containing mercury in a ratio of from 0.5-0.9 microliters per milliliter of envelope volume at room temperature. A lamp including such bulb which is powered by microwaves. |
| 4794503 |
Lamp having improved image resolution |
December 27, 1988 |
| A lamp including a reflector and a light source for illuminating a target area in which the light rays on the target and have a small average local divergence. The reflector and light source are configured so that the predominant portion of the light rays which strike the target area do |
| 4749915 |
Microwave powered electrodeless light source utilizing de-coupled modes |
June 7, 1988 |
| A microwave powered electrodeless light source in which a relatively high power level is coupled to the bulb. This is accomplished by arranging for a plurality of energy modes which are substantially de-coupled from each other to be present in the microwave cavity. |
| 4695757 |
Method and apparatus for cooling electrodeless lamps |
September 22, 1987 |
| A method of cooling the lamp envelope of an electrodeless lamp by directing a stream of cooling gas at the envelope while providing relative rotation between the lamp envelope and the stream of cooling gas. The relative rotation can be achieved by rotating the envelope, or the source of |
| 4641033 |
Apparatus and method preventing radiation induced degradation of optical elements |
February 3, 1987 |
| An apparatus and method for maintaining an optical element at a sufficiently high temperature during transmission of radiation by the optical element to prevent radiation degradation of the optical element by an increase in the absorption of at least one wavelength of the radiation. |
| 4633140 |
Electrodeless lamp having staggered turn-on of microwave sources |
December 30, 1986 |
| A microwave powered electrodeless light source which is powered by two magnetrons which are excited successively. |
| 4532427 |
Method and apparatus for performing deep UV photolithography |
July 30, 1985 |
| A method and apparatus for performing deep UV photolithography which utilizes a microwave generated electrodeless light source for producing deep UV radiation. This results in faster semiconductor exposure times and less system downtime for changing failed bulbs as well as other advantag |
| 4507587 |
Microwave generated electrodeless lamp for producing bright output |
March 26, 1985 |
| A microwave generated electrodeless light source for producing a bright output comprising a lamp structure including a microwave chamber and a plasma medium-containing lamp envelope having a maximum dimension which is substantially less than a wavelength disposed therein. To provide the |
| 4504768 |
Electrodeless lamp using a single magnetron and improved lamp envelope therefor |
March 12, 1985 |
| A microwave generated electrodeless lamp using a single magnetron, and an improved lamp envelope therefor. An elongated lamp envelope containing a plasma forming medium is disposed in a microwave chamber comprised of a reflector and mesh. The reflector includes a pair of coupling slots, |
| 4501993 |
Deep UV lamp bulb |
February 26, 1985 |
| An electrodeless lamp bulb for producing relatively high radiation output in the deep ultraviolet part of the spectrum when excited with microwave energy wherein the bulb envelope is made of synthetic quartz which is substantially water-free. This results in increased bulb lifetime, sinc |
| 4485332 |
Method & apparatus for cooling electrodeless lamps |
November 27, 1984 |
| A method and apparatus for cooling electrodeless lamps which permits high power density operation, and bright lamp output. The lamp envelope is rotated about an axis passing therethrough while at least a stream of cooling gas is directed at it. A plurality of such streams may be posi |
| 4359668 |
Method and apparatus for igniting electrodeless discharge lamp |
November 16, 1982 |
| A method and apparatus for igniting a microwave generated discharge lamp. An ultraviolet-producing means is positioned so as to irradiate the fill-containing envelope of the discharge lamp. The ultraviolet-producing means is excited by microwave energy which is extracted from means which |
| 4269581 |
Apparatus for molding thermosetting material |
May 26, 1981 |
| An apparatus and method for molding thermosetting material into shaped articles rapidly and without the occurrence of hot spots or other defects. A mold having a cavity conforming to the shape of the article to be molded is provided and is filled with thermosetting material. An energy so |
| 4227170 |
Current-reducing device |
October 7, 1980 |
| A current-reducing device (fuse or switch) is described comprising a foil mber of Al or Mg which is immersed in a fluid with which it will chemically react (such as H.sub.2 O or H.sub.2 O.sub.2) above a certain temperature. The foil member is an electrical conductor but becomes an el |
| 4208587 |
Method and apparatus for ultraviolet curing of three dimensional objects without rotation |
June 17, 1980 |
| A method and apparatus for curing three dimensional objects such as cylindrical two piece cans with ultraviolet light without having to rotate the cans, at conventional can line speeds and using a minimum number of lamp units. In a first embodiment, the cans are moved, without rotation, |
