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Kaichi Ueno Patents
Inventor:
Ueno; Kaichi
Address:
Sanda, JP
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
5847466 Semiconductor device and manufacturing method for the same December 8, 1998
A semiconductor device having a multilayer interconnection structure, includes a substrate having a metal interconnect layer provided thereon and N number (N being an integer of 2 or greater) of layers of insulating film formed one on top of another on the substrate. Each layer of in


 
 
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