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Taroh Uchiyama Patents |
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Inventor: Uchiyama; Taroh
Address: Takasago, JP
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6065615 |
Vertical wafer boat |
May 23, 2000 |
| A pair of annular end plates and a plurality of bars which are made of silicon carbide are formed in an integrally coupled/joined structure, having an entire length of not less than 800 mm. The end plates are unitary annular plates. Padding of silicon carbide is formed at a coupled/j |
| 5902406 |
Low pressure CVD system |
May 11, 1999 |
| A low pressure CVD system comprising an inner tube having an upper end and a lower end opened, and made of a silicon carbide material, an outer tube including a circumferential wall surrounding an outer periphery of the inner tube with a predetermined spacing, an upper wall closing an up |
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