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Shinobu Tokushima Patents |
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Inventor: Tokushima; Shinobu
Address: Tokyo, JP
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6735867 |
Method of making a static pressure air bearing |
May 18, 2004 |
| In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lo |
| 6499880 |
Static pressure air bearing |
December 31, 2002 |
| In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lo |
| 6328473 |
Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage a |
December 11, 2001 |
| A static air-bearing provides a gas layer between two relatively movable parts (fixed part and movable part) and a predetermined clearance between the two parts, to a stage apparatus, and to an optical apparatus, and provides a static air-bearing, a stage apparatus, and an optical appara |
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