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Wim Tjibbo Tel Patents |
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Inventor: Tel; Wim Tjibbo
Address: Helmond, NL
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7403264 |
Lithographic projection apparatus and a device manufacturing method using such lithographic proj |
July 22, 2008 |
| A lithographic projection apparatus is disclosed that includes a predictive system configured to predict changes in projection system aberrations with time with respect to measured aberration values, a modelling system configured to determine an application-specific effect of said pr |
| 7403259 |
Lithographic processing cell, lithographic apparatus, track and device manufacturing method |
July 22, 2008 |
| A rework station and a metrology device(s) are incorporated into a lithographic processing cell so that a faulty substrate can be reworked directly and reprocessed without, for example, an overhead involved in changing masks, etc. |
| 7262831 |
Lithographic projection apparatus and device manufacturing method using such lithographic projec |
August 28, 2007 |
| A lithographic projection apparatus includes a measurement system for measuring changes in projection system aberrations with time, and a predictive control system for predicting variation of projection system aberrations with time on the basis of model parameters and for generating |
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