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Chihiro Taguchi Patents |
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Inventor: Taguchi; Chihiro
Address: Kofu, JP
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7067178 |
Substrate table, production method therefor and plasma treating device |
June 27, 2006 |
| The susceptor (10) of a plasma treating device, or the electrostatic chuck (12) of a substrate table is formed by ceramic thermal spray method. A ceramic spray layer (12A) is pore-sealed by methacrylic resin (12D). Resin raw material mainly containing methyl methacrylate is applied to |
| 6492612 |
Plasma apparatus and lower electrode thereof |
December 10, 2002 |
| The present invention is constituted of a lower electrode structure (1) comprising a base table (2) formed of a conductive material, an electrostatic adsorption member (3) formed on the base table (2) and having a dielectric layer (4) on which the substrate to be mounted and within w |
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