| Patent Number |
Title Of Patent |
Date Issued |
| 7402475 |
Method of manufacturing a semiconductor integrated circuit device |
July 22, 2008 |
| In forming five trenches buried with an intermediate conductive layer for connecting transfer MISFETs and driving MISFETs with vertical MISFETs formed thereover, in which the second and third trenches, and the first, fourth, and fifth trenches are formed separately by twice etching using |
| 7375037 |
Fabrication method for semiconductor integrated circuit device |
May 20, 2008 |
| To improve the shape of a gate electrode having SiGe, after patterning a gate electrode 15G having an SiGe layer 15b by a dry etching process, a plasma processing (postprocessing) is carried out in an atmosphere of an Ar/CHF.sub.3 gas. Thereby, the gate electrode 15G can be formed withou |
| 7247869 |
Particle therapy system |
July 24, 2007 |
| A particle therapy system capable of measuring energy of a charged particle beam even during irradiation of the charged particle beam is provided. A beam delivery (irradiation) system comprises a block collimator constituted by a pair of collimator members, and an energy detector mou |
| 7186578 |
Thin sheet production method and thin sheet production device |
March 6, 2007 |
| In order to obtain a thin plate manufacturing method capable of extremely increasing manufacturing efficiency by enlarging the production scale and remarkably reducing the manufacturing cost per unit area and an apparatus for manufacturing this thin plate, a method and an apparatus perfo |
| 7154108 |
Particle therapy system |
December 26, 2006 |
| A particle therapy system capable of measuring energy of a charged particle beam even during irradiation of the charged particle beam is provided. A beam delivery (irradiation) system comprises a block collimator constituted by a pair of collimator members, and an energy detector mou |
| 7109126 |
Method of manufacturing a semiconductor integrated circuit device |
September 19, 2006 |
| In forming five trenches buried with an intermediate conductive layer for connecting transfer MISFETs and driving MISFETs with vertical MISFETs formed thereover, the second and third trenches, and the first, fourth, and fifth trenches are formed separately by twice etching using first an |
| 6838388 |
Fabrication method of semiconductor integrated circuit device |
January 4, 2005 |
| A fabrication method of a semiconductor integrated circuit device comprises, in an SAC process or HARC process, subjecting a semiconductor substrate to plasma etching to make contact holes in an oxide film made of a silicon oxide film formed on the semiconductor substrate. For improving |
| 6633072 |
Fabrication method for semiconductor integrated circuit devices and semiconductor integrated cir |
October 14, 2003 |
| To improve the shape of a gate electrode having SiGe, after patterning a gate electrode 15G having an SiGe layer 15b by a dry etching process, a plasma processing (postprocessing) is carried out in an atmosphere of an Ar/CHF.sub.3 gas. Thereby, the gate electrode 15G can be formed withou |
| 6506674 |
Method of manufacturing a semiconductor integrated circuit device |
January 14, 2003 |
| A hole is formed on an insulating film made of silicon oxide by selectively plasma-etching the insulating film with an etching gas containing C.sub.5 F.sub.8, O.sub.2, and Ar firstly under a condition in which the deposition property of a polymer layer is weak and secondly under a condit |
| 6479392 |
Fabrication method for semiconductor integrated circuit devices and semiconductor integrated cir |
November 12, 2002 |
| To improve the shape of a gate electrode having SiGe, after patterning a gate electrode 15G having an SiGe layer 15b by a dry etching process, a plasma processing (postprocessing) is carried out in an atmosphere of an Ar/CHF.sub.3 gas. Thereby, the gate electrode 15G can be formed withou |
| 6365894 |
Electromagnet and magnetic field generating apparatus |
April 2, 2002 |
| An electromagnet comprises a pair of magnetic pole 1a and 1b, a return yoke 3, exciting coils 4 and 5, etc. In an interior portion of a magnetic pole, plural spacers 2a-2g are provided putting side by side in a horizontal direction. Each of the spaces 2a-2g is an air layer and a longitud |
| 6316776 |
Charged particle beam apparatus and method for operating the same |
November 13, 2001 |
| A method of irradiation with a charged particle beam and an irradiation apparatus wherein the charged particle beam supplied from an accelerator and extracted from the irradiation apparatus. The irradiation apparatus includes an electromagnet for scanning with the charged particle beam. |
| 6236043 |
Electromagnet and magnetic field generating apparatus |
May 22, 2001 |
| An electromagnet comprises a pair of magnetic pole 1a and 1b, a return yoke 3, exciting coils 4 and 5, etc. In an interior portion of a magnetic pole, plural spacers 2a-2g are provided putting side by side in a horizontal direction. Each of the spaces 2a-2g is an air layer and a longitud |
| 5783914 |
Particle beam accelerator, and a method of operation |
July 21, 1998 |
| The present invention provides apparatus for acceleration of a charged particle beam which includes energy means for altering the energy of a circulating beam circulating in the apparatus and means for extracting output beams from the apparatus. Control means are arranged to be operable |
| 5576602 |
Method for extracting charged particle beam and small-sized accelerator for charged particle bea |
November 19, 1996 |
| A circular accelerator is arranged to circulate a charged particle beam through a bending function provided by a bending magnet, set a tune of the charged particle beam being circulated as it is betatron-oscillated to a predetermined value through the effect of a quadrupole magnetic fiel |
| 4512801 |
Apparatus for and method of desulfurizing and heating molten metal |
April 23, 1985 |
| Apparatus for desulfurizing and heating molten metal includes a refractory body having an open top receptacle, an outlet and a passageway communicating the receptacle with the outlet. An electric coil is disposed in surrounding relation to the receptacle. The upper end of the coil is |
| 4375885 |
Reverberatory furnace |
March 8, 1983 |
| A reverberatory furnace includes a reverberatory furnace body for melting metal and holding molten metal, having an opening well, an electromagnetic trough for transporting hot molten metal from the reverberatory furnace body upwardly and slantly, having an inductor for generating a trav |
