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Rich Stocks Patents
Inventor:
Stocks; Rich
Address:
Boise, ID
No. of patents:
3
Patents:




Patent Number Title Of Patent Date Issued
7125804 Etching methods and apparatus and substrate assemblies produced therewith October 24, 2006
Methods and apparatus for etching substrates such as silicon wafers are provided. In one specific approach, a surface of the substrate assembly is covered with a resist that is patterned to define features to be etched. In this approach, the surface is then exposed to a plasma in a p
6784111 Etching methods and apparatus and substrate assemblies produced therewith August 31, 2004
Methods and apparatus for etching substrates such as silicon wafers are provided. In one specific approach, a surface of the substrate assembly is covered with a resist that is patterned to define features to be etched. In this approach, the surface is then exposed to a plasma in a plasm
6635335 Etching methods and apparatus and substrate assemblies produced therewith October 21, 2003
Methods and apparatus for etching substrates such as silicon wafers are provided. In one specific approach, a surface of the substrate assembly is covered with a resist that is patterned to define features to be etched. In this approach, the surface is then exposed to a plasma in a plasm


 
 
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