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Rich Stocks Patents |
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Inventor: Stocks; Rich
Address: Boise, ID
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7125804 |
Etching methods and apparatus and substrate assemblies produced therewith |
October 24, 2006 |
| Methods and apparatus for etching substrates such as silicon wafers are provided. In one specific approach, a surface of the substrate assembly is covered with a resist that is patterned to define features to be etched. In this approach, the surface is then exposed to a plasma in a p |
| 6784111 |
Etching methods and apparatus and substrate assemblies produced therewith |
August 31, 2004 |
| Methods and apparatus for etching substrates such as silicon wafers are provided. In one specific approach, a surface of the substrate assembly is covered with a resist that is patterned to define features to be etched. In this approach, the surface is then exposed to a plasma in a plasm |
| 6635335 |
Etching methods and apparatus and substrate assemblies produced therewith |
October 21, 2003 |
| Methods and apparatus for etching substrates such as silicon wafers are provided. In one specific approach, a surface of the substrate assembly is covered with a resist that is patterned to define features to be etched. In this approach, the surface is then exposed to a plasma in a plasm |
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