| Patent Number |
Title Of Patent |
Date Issued |
| 5202898 |
Laser oscillator, laser resonator, and apparatus for manufacturing of semiconductor |
April 13, 1993 |
| The present invention relates to a laser oscillator, especially to a laser oscillator suitable for ultrafine manufacturing such as an apparatus for manufacturing of a semiconductor wherein the laser oscillator is provided with constant directivity chronically, although the directivity is |
| 5117434 |
Metal vapor laser apparatus |
May 26, 1992 |
| A metal vapor laser has a discharge tube with electrodes at opposite ends. A power source is electronically connected to the electrodes and generates a discharge in a discharge region within the discharge tube. The discharge generates laser light which emerges from the tube via windows. |
| 4991180 |
Metallic vapor laser apparatus |
February 5, 1991 |
| A metallic vapor laser apparatus includes a cylindrical discharge tube (31) having an internal space (2), a heat-insulating material (6) encompassing the periphery of the discharge tube (31), and two electrodes (3a) and (3b) having a cylindrical portion coaxial with the discharge tube (3 |
| 4740980 |
Gas laser device |
April 26, 1988 |
| In a gas laser device according to this invention, a gas inlet having an electrode protrudes within each of expanded portions protruding on the side, where the gas inlet is disposed, of the principal portion of the discharge tube. Gas medium ejected from the gas inlet in the principal |
| 4602372 |
Gas laser generator |
July 22, 1986 |
| A discharge tube structure of a gas laser generator has end common vessels at its both end sections and an intermediate common vessel at its intermediate section. The end common vessels and intermediate common vessel are connected through the first and second cooling ducts to a centr |
| 4590599 |
Gas laser device |
May 20, 1986 |
| A gas laser device has an anode and a cathode arranged oppositely in a discharge tube. The cathode comprises a plurality of cathode members each having a predetermined discharge effective cathode surface and each being electrically isolated from others. A switching circuit selects the ca |
| 4541097 |
Gas laser device with plural electrode members on the upper gas flow side |
September 10, 1985 |
| A gas laser has an electrode of improved construction. The electrode, for example a cathode, comprises an inner cathode and at least an outer cathode spaced from the inner cathode and disposed on the side thereof away from to an anode. Each of the cathodes has a central hole from which |
| 4500998 |
Gas laser |
February 19, 1985 |
| The invention is to provide a gas laser in which a discharge tube of a double-tube construction comprising a inner tube and an outer tube of a relatively large diameter is employed, a tubular discharge space filled with a gas mixture is formed between the inner tube and the outer tube, a |
| 4474468 |
Method of and apparatus for measuring laser beam |
October 2, 1984 |
| According to the invention, a thin wire 13 is arranged across the laser beam 2, and the change of resistance in the thin wire 13 is measured by a resistance meter 21 while moving the thin wire 13 by a driving mechanism 23, thereby to measure the power of the laser beam or the position of |
| 4468777 |
Mirror supporting frame for gas laser oscillation apparatus |
August 28, 1984 |
| A gas laser oscillation apparatus wherein, in order to prevent a center axis of a reflecting mirror included in a laser resonator from deviating from an optical axis of the laser resonator due to the deformation of a mirror supporting frame caused by a vacuum force applied to a laser tub |
| 4391519 |
Axis-monitoring apparatus for a laser beam |
July 5, 1983 |
| A laser beam axis monitoring apparatus which includes a laser oscillator generating a laser beam and a light generator for generating a light for monitoring an axis of the laser. The light from the light generator is split into ring-shaped light and reflected or lead into the laser o |
| 4351052 |
Coaxial type gas-flow laser device |
September 21, 1982 |
| In a coaxial type gas-flow laser device in which a laser beam axis, an electric discharge axis and a gas flow axis are coincident, at least one centrifugal blower is employed for circulating a laser gas. Where two centrifugal blowers are employed, they oppose to each other in an axial |
| 4331939 |
Gas laser device |
May 25, 1982 |
| An invention concerning the electrode structure of a gas laser device is disclosed. In the outer peripheral part of a discharge gas circulating hole (32) provided in the central part of an upper gas stream side one (16) of electrodes (14) and (16) disposed at both the ends of a discharge |
| 4287487 |
Gas laser generating device of the longitudinal gas flow type |
September 1, 1981 |
| A gas laser generating device of the longitudinal gas flow type having at least two glow discharge tubes, each of which has positive and negative electrodes, electric insulating tubes which are inserted between the two glow discharge tubes in order to provide insulation therebetween, and |
