| Patent Number |
Title Of Patent |
Date Issued |
| 6760358 |
Line-narrowing optics module having improved mechanical performance |
July 6, 2004 |
| An apparatus for adjusting an orientation of an optical component mounted within a laser resonator with suppressed hysteresis includes an electromechanical device, a drive element, and a mechano-optical device coupled to the mounted optical component. The drive element is configured |
| 6735225 |
Chirp compensation method and apparatus |
May 11, 2004 |
| A wavelength chirp compensation method for an excimer or molecular fluorine laser system operating in burst mode, includes pre-programming into a computer of the laser system resonator tuning optic adjustments for making the adjustments during pauses between bursts to compensate waveleng |
| 6700916 |
E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic e |
March 2, 2004 |
| An E-Diagnostic system for monitoring a state of an excimer laser or molecular fluorine laser system includes a processing device and an interface. The processing device runs a program for outputting parameter requests to the laser system, receiving parameter values from the laser sy |
| 6597462 |
Laser wavelength and bandwidth monitor |
July 22, 2003 |
| A first method for determining the relative wavelength shift of a laser beam away from a known reference line, such as an absorption line of a gas in an opto-galvanic cell or a reference line of reference laser uses a monitor etalon. The FSR of the etalon used to calculate the wavelength |
| 6563853 |
Gas performance control system for gas discharge lasers |
May 13, 2003 |
| An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontan |
| 6549555 |
Gas performance control system for gas discharge lasers |
April 15, 2003 |
| An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontan |
