| Patent Number |
Title Of Patent |
Date Issued |
| 7274079 |
Sensor design and process |
September 25, 2007 |
| An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and |
| 7267779 |
Thermally efficient micromachined device |
September 11, 2007 |
| A micromachined device for efficient thermal processing at least one fluid stream includes at least one fluid conducting tube having at least a region with wall thickness of less than 50 .mu.m. The device optionally includes one or more thermally conductive structures in thermal comm |
| 6945110 |
Sensor design and process |
September 20, 2005 |
| An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a |
| 6939632 |
Thermally efficient micromachined device |
September 6, 2005 |
| A micromachined device for efficient thermal processing at least one fluid stream includes at least one fluid conducting tube having at least a region with wall thickness of less than 50 .mu.m. The device optionally includes one or more thermally conductive structures in thermal comm |
| 6932951 |
Microfabricated chemical reactor |
August 23, 2005 |
| A microfabricated chemical reactor includes a plurality of lamina, an inlet port formed in at least one of the lamina, and an outlet port formed in at least one of the lamina. A continuous channel is formed in at least one of the lamina and provides fluid communication between the inlet |
| 6871544 |
Sensor design and process |
March 29, 2005 |
| An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a |
| 6810899 |
Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenat |
November 2, 2004 |
| The present invention relates to gas separation membranes including a metal-based layer having sub-micron scale thicknesses. The metal-based layer can be a palladium alloy supported by ceramic layers such as a silicon oxide layer and a silicon nitride layer. By using MEMS, a series o |
| 6671078 |
Electrostatic zipper actuator optical beam switching system and method of operation |
December 30, 2003 |
| A zipper actuator for optical beam control has an optical port formed through the substrate. The cantilevered beam of the actuator preferably includes a paddle for switching the optical signal. Mirror structures can be provided on the paddle for beam switching. In some embodiments, MEMS |
| 6541676 |
Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenat |
April 1, 2003 |
| The present invention relates to gas separation membranes including a metal-based layer having sub-micron scale thicknesses. The metal-based layer can be a palladium alloy supported by ceramic layers such as a silicon oxide layer and a silicon nitride layer. By using MEMS, a series o |
| 6538798 |
Process for fabricating stiction control bumps on optical membrane via conformal coating of etch |
March 25, 2003 |
| An electrostatically driven optical membrane comprises a support structure and a membrane structure separated from the support structure by an electrostatic cavity. Stiction plugs are formed in the membrane structure. The plugs extend from a surface of the membrane. In one implementation |
| 6392313 |
Microturbomachinery |
May 21, 2002 |
| The invention overcomes limitations of conventional power and thermodynamic sources by with micromachinery components that enable production of significant power and efficient operation of thermodynamic systems in the millimeter and micron regime to meet the efficiency, mobility, modular |
| 6315423 |
Micro machined mirror |
November 13, 2001 |
| A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the |
| 6017469 |
Supertwist liquid-crystal display |
January 25, 2000 |
| Supertwist liquid crystal displays with outstanding properties are obtained when the nematic liquid crystal mixture contains at least one compound of the formula (I): ##STR1## where the variables are as defined in the disclosure. |
| 5932940 |
Microturbomachinery |
August 3, 1999 |
| The invention provides a micro-gas turbine engine and associated microcomponentry. The engine components, including, e.g., a compressor, a diffuser having diffuser vanes, a combustion chamber, turbine guide vanes, and a turbine are each manufactured by, e.g., microfabrication techniques, |
| 5511428 |
Backside contact of sensor microstructures |
April 30, 1996 |
| A sensor microstructure contact scheme is provided for making backside electrical, mechanical, fluidic, or other contact to mechanical microstructures. The contact scheme is applicable to pressure sensors, shear stress sensors, flow rate sensors, temperature sensors, resonant microac |
| 5308538 |
Supertwist liquid-crystal display |
May 3, 1994 |
| Supertwist liquid-crystal displays having excellent properties are obtained using a nematic liquid-crystal mixture based on component A which contains one or more compounds of the formula IIa or IIb: ##STR1## on or more compounds of the formulae IIc to IIe: ##STR2## and one o |
| 5264375 |
Superconducting detector and method of making same |
November 23, 1993 |
| A detector useful for detecting infrared (IR) radiation is described which is formed of an epitaxial film of superconductive material having a high transition temperature Tc. Specifically, an oxide of yttrium barium and copper is preferred for the high Tc material. The sensor is formed o |
| 5238223 |
Method of making a microvalve |
August 24, 1993 |
| A microvalve composed of multiple layers bonded together is distinguished by the fact that all layers are structured only from one side. Prior to bonding of a new layer to the preceding layer, the new layer is homogeneous or unstructured. Only after bonding of the new layer to the pr |
| 5199298 |
Wall shear stress sensor |
April 6, 1993 |
| A shear stress sensor is fabricated using wafer bonding technology. The shear stress sensor is a floating element shear stress sensor designed to measure shear stresses of about 1 kPa-100 kPa over a wide range of operating conditions (temperature, humidity), as well as for a large va |
| 5164558 |
Micromachined threshold pressure switch and method of manufacture |
November 17, 1992 |
| A pressure activated threshold switch has two electrodes separated by a small distance across a cavity. One of the electrodes is made of a mechanically compliant material. As a uniform pressure is applied to the mechanically compliant electrode, a threshold is reached at which the el |
| 5142781 |
Method of making a microvalve |
September 1, 1992 |
| A microvalve composed of multiple layers bonded together is distinguished by the fact that all layers are structured only from one side. Prior to bonding of a new layer to the preceding layer, the new layer is homogeneous or unstructured. Only after bonding of the new layer to the pr |
| 5129982 |
Selective electrochemical etching |
July 14, 1992 |
| A method of selectively etching a body of a semiconductor material, such as single crystalline silicon, having regions of n-type and p-type conductivity to remove at least a portion of the n-type region. The body is placed in an etching solution of an etchant having a high pH value and |
| 5129981 |
Method of selectively etching silicon |
July 14, 1992 |
| The present invention relates to a method of forming thin bodies of a semiconductor material, such as single crystalline silicon, by selectively etching away a portion of the body until a body of the desired thicknes is obtained. The body includes a p-n junction made up of adjacent regio |
| 5043043 |
Method for fabricating side drive electrostatic micromotor |
August 27, 1991 |
| An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the |
| 4997521 |
Electrostatic micromotor |
March 5, 1991 |
| An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An |
| 4943750 |
Electrostatic micromotor |
July 24, 1990 |
| An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An |
| 4896098 |
Turbulent shear force microsensor |
January 23, 1990 |
| A microbridge is used for the accurate measuring of time varying shear forces in the presence of fluctuating pressure. A microdimensioned plate is suspended by arms to form a microbridge. The microdimensions enable the smallest turbulence scales of interest to be sensed uniformally throu |
