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Yukishige Saito Patents
Inventor:
Saito; Yukishige
Address:
Tokyo, JP
No. of patents:
6
Patents:




Patent Number Title Of Patent Date Issued
7211517 Semiconductor device and method that includes reverse tapering multiple layers May 1, 2007
A method of manufacturing a semiconductor device of the present invention includes (a) sequentially forming a gate insulating film 14, a first conductive layer 15 and a first insulating film 16 on a semiconductor layer 13 provided on an insulating film 12; (b) selectively removing the
6975001 Semiconductor device and method of fabricating the same December 13, 2005
A semiconductor device includes (a) a semiconductor layer formed on an electrically insulating layer, (b) a gate insulating film formed on the semiconductor layer, (c) a gate electrode formed on the gate insulating film, and (d) a field insulating film formed on the semiconductor layer
6933569 SOI MOSFET August 23, 2005
A semiconductor device includes a semiconductor layer formed on an insulator, a gate insulating film formed on the semiconductor layer, a gate electrode formed on the gate insulating film and extending in a first direction, source/drain regions formed in the semiconductor layer on both
6916695 Semiconductor device and method of manufacturing the same July 12, 2005
One object of the present invention is to suppress a threshold voltage of at least an n-channel MISFET using a nitride of a high melting point metal at it's gate electrode. In order to achieve the object, a gate electrode 109 of a p-channel MISFET is constituted of a titanium nitride fil
6483151 Semiconductor device and method of manufacturing the same November 19, 2002
One object of the present invention is to suppress a threshold voltage of at least an n-channel MISFET using a nitride of a high melting point metal at it's gate electrode. In order to achieve the object, a gate electrode 109 of a p-channel MISFET is constituted of a titanium nitride fil
6077437 Device and method for recovering and reusing a polishing agent June 20, 2000
A polishing agent recovery and reuse method and device for the same removes large impurities by a filtration device, concentrates by an ultrafiltration device, and continuously recovers polishing agent. Polishing agent used in polishing a semiconductor board or a coating formed on to


 
 
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