| Patent Number |
Title Of Patent |
Date Issued |
| 4447783 |
Programmable RF power regulator (stabilizer) |
May 8, 1984 |
| Disclosed is a regulator circuitry (stabilizer) for controlling the output of an RF generator according to a programmable input signal. A power stage is responsive to the selected value of the programmable input signal to drive the RF generator at the desired power level. A forward power |
| 4409087 |
Wafer detection circuitry for high vacuum use |
October 11, 1983 |
| Disclosed is a detector for determining the location of wafers moving in a sputtering system, for example, to and from the sputtering chamber where the wafers are processed, including a capacitive transducer, located in the path of travel of the wafers, to which is coupled an oscillator |
| 4287466 |
Control circuitry for maintaining forward and reflected transmission line power at a predetermin |
September 1, 1981 |
| Circuitry for controlling the power output of an R.F. generator for regulating the forward power transmitted into a load of varying impedance, such as an R.F. sputtering target, and for limiting reflected power to a safe predetermined level. Forward power is controlled by circuitry that |
| 4276591 |
Programmable power regulating power supply |
June 30, 1981 |
| A high power D.C. supply regulated for constant output power to be dissipated in varying loads such as encountered in cathode sputtering systems. A.C. input power is rectified to produce the desired D.C. The output D.C. voltage and load current are measured and a voltage signal propo |
