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Chris S. Peay Patents
Inventor:
Peay; Chris S.
Address:
Alhambra, CA
No. of patents:
2
Patents:




Patent Number Title Of Patent Date Issued
7396478 Multiple internal seal ring micro-electro-mechanical system vacuum packaging method July 8, 2008
A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum packaging method that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer t
7285844 Multiple internal seal right micro-electro-mechanical system vacuum package October 23, 2007
A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum package that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the


 
 
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