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Daniel G. Parker Patents |
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Inventor: Parker; Daniel G.
Address: Palo Alto, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6830990 |
Method and apparatus for dicing released MEMS wafers |
December 14, 2004 |
| Various embodiments are methods and apparatuses for different steps in separating wafers into multiple wafer die. Some embodiments are adapted for dicing wafers having a front side and a back side, where the front side has processed devices, such as MEMS devices. |
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