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Daniel G. Parker Patents
Inventor:
Parker; Daniel G.
Address:
Palo Alto, CA
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
6830990 Method and apparatus for dicing released MEMS wafers December 14, 2004
Various embodiments are methods and apparatuses for different steps in separating wafers into multiple wafer die. Some embodiments are adapted for dicing wafers having a front side and a back side, where the front side has processed devices, such as MEMS devices.


 
 
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