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Marco Pagani Patents
Inventor:
Pagani; Marco
Address:
Novara, IT
No. of patents:
2
Patents:




Patent Number Title Of Patent Date Issued
5403406 Silicon wafers having controlled precipitation distribution April 4, 1995
A silicon wafer containing oxygen precipitate nucleation centers (or oxygen precipitates) and having a first face, a second face, and a central plane equidistant between the first and second faces. The nucleation centers (or oxygen precipitates) have a non-uniform distribution between th
5401669 Process for the preparation of silicon wafers having controlled distribution of oxygen precipita March 28, 1995
A process for treatment of a silicon wafer to achieve therein a controlled distribution of the density of oxygen precipitate nucleation centers. In the process, one face of the wafer is shielded and the other, unshielded, face of the wafer is exposed to an atmosphere which contains nitro


 
 
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