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Kenji Oka Patents
Inventor:
Oka; Kenji
Address:
Hitachinaka, JP
No. of patents:
31
Patents:




Patent Number Title Of Patent Date Issued
7417723 Method of inspecting a semiconductor device and an apparatus thereof August 26, 2008
A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspect
7397419 Radar apparatus and failure detection method thereof July 8, 2008
The present invention provides a radar apparatus, which can diagnose failure at low cost with high accuracy, and a failure diagnosis method thereof. An antenna serves as both a transmit antenna and a receive antenna. A transmit and receive select switch switches the transmission and
7376247 Target detection system using radar and image processing May 20, 2008
A target detection system using an EHF radar and the image processing is disclosed, in which the processing time is shortened by mutually complementing the disadvantages of the EHF radar and the image processing thereby to improve the reliability. The system comprises a radar, an ima
7335328 Method for manufacturing multilayer ceramic capacitor February 26, 2008
A method of manufacturing a multilayer ceramic capacitor includes the steps of: preparing a mixture of a raw material powder mainly composed of barium titanate particles; forming the mixture and a binder into a green sheet; alternately layering the green sheet and an internal electrode t
7274813 Defect inspection method and apparatus September 25, 2007
A method of inspecting defects of a plurality of patterns that are formed on a substrate to have naturally the same shape. According to this method, in order to detect very small defects of the patterns with high sensitivity without being affected by irregular brightness due to the t
7266221 Ranging device utilizing image processing September 4, 2007
An image size changing section obtains a size-changed image by changing the size of one of two original images captured by a pair of cameras. If an edge of an object has many oblique components, the edge is difficult to detect as a vertical edge but, when the image is horizontally reduce
7233279 Method and device for distance measurement by pulse radar June 19, 2007
In order to provide the method and the device for distance measurement by pulse radar that securely eliminates the false echo from the distance over the detectable limit determined by the pulse generation cycle, the pulse radar comprises the pulse signal sending unit that generates the
7221486 Method and apparatus for picking up 2D image of an object to be sensed May 22, 2007
A method and apparatus for sensing by a linear image sensor a two-dimensional image of an object to be sensed includes detecting a position of the object by a position sensor having a first resolution, picking up an image of the object being projected in a direction (V-scan direction
7181634 Apparatus for switching between a combination of operating modes such that the power consumed is February 20, 2007
An information processor having a plurality of operating modes differing in power consumption and capable of changing the operating mode according to the amount of processing has periodic switching detection means of performing detection as to whether the information processor is per
7180584 Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects February 20, 2007
A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high y
7167992 Method for controlling the switching of operating modes of an information processor according to January 23, 2007
An information processor having a plurality of operating modes differing in power consumption and capable of changing the operating mode according to the amount of processing has periodic switching detection means of performing detection as to whether the information processor is per
7092095 Method and apparatus for observing and inspecting defects August 15, 2006
A defect inspecting apparatus can detect finer defects with high resolution optical images of those defects. The apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting th
7061602 Method of inspecting a semiconductor device and an apparatus thereof June 13, 2006
A method of inspecting a sample in which the sample is inspected under a plurality of inspection conditions and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in corr
7061600 Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects June 13, 2006
A pattern detection method and apparatus for inspecting, with high resolution, a micro fine defect of a pattern on an inspected object, and a semiconductor substrate manufacturing method and system with a high yield. A micro fine pattern on the inspected object is inspected by annula
6947587 Defect inspection method and apparatus September 20, 2005
A method of inspecting defects of a plurality of patterns that are formed on a substrate to have naturally the same shape. According to this method, in order to detect very small defects of the patterns with high sensitivity without being affected by irregular brightness due to the t
6947276 Process for producing laminated ceramic capacitor September 20, 2005
The present invention relates to a method of manufacturing a multilayer ceramic capacitor, having the steps of: (a) alternately layering internal electrodes and ceramic green sheets containing a ceramic material having barium titanate to form a laminated body; (b) sintering the laminated
6888959 Method of inspecting a semiconductor device and an apparatus thereof May 3, 2005
In order to inspect a substance to be detected such as a foreign substance in accordance with the condition of the surface of a sample to be inspected such as a semiconductor substrate manufactured in various manufacturing processes under a suitable inspection condition, this method
6690469 Method and apparatus for observing and inspecting defects February 10, 2004
A defect inspecting apparatus is disclosed that can detect finer defects with high resolution optical images of those defects, and which makes the difference in contrast greater between fine line patterns of a semiconductor device. The defect inspecting apparatus includes a sample mo
6674890 Defect inspection method and apparatus therefor January 6, 2004
A pattern inspection method and apparatus in which an image of a first pattern formed on a sample and an image of a second pattern formed on the sample is detected. At least one of the first pattern image and the second pattern image is converted to a gray level so as to be substantially
6507417 Method and apparatus for picking up 2D image of an object to be sensed January 14, 2003
An image pickup device for sensing a two-dimensional (2D) image while causing a projected image of an object to be sensed being projected onto a linear image sensor to relatively move with respect to the linear image sensor in a direction (V scanning) perpendicular to the internal scan (
6456951 Method and apparatus for processing inspection data September 24, 2002
The present invention is related to an inspection data processing method for processing inspection data composed of coordinates data and characteristic quantity data about a defect generated on a subject of inspection detected with a visual inspection apparatus. The inspection data p
6404498 Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects June 11, 2002
A pattern detection method and apparatus for inspecting, with high resolution, a micro fine defect of a pattern on an inspected object, and a semiconductor substrate manufacturing method and system with a high yield. A micro fine pattern on the inspected object is inspected by annula
6384247 Method of producing sesamol formic acid ester and sesamol May 7, 2002
Heliotropin is oxidized with a percarboxylic acid in the presence of formic acid and an optionally added organic solvent, to thereby produce sesamol at high efficiency while suppressing by-production of heliotropic acid.
6263099 Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects July 17, 2001
A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high y
6169282 Defect inspection method and apparatus therefor January 2, 2001
A defect inspection method and apparatus therefor for a pattern to be inspected having a plurality of chips formed so as to be identical detect an image signal of a pattern to be inspected and when the image signal is to be compared with a detected image signal of an adjacent or separate
6091075 Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus July 18, 2000
An automatic focus detection method comprises the steps of: irradiating onto a single spot of a sample a plurality of beams of illuminating light transmitted and condensed through an objective lens in a symmetrically diagonal manner with respect to an optical axis of the objective lens;
5914428 Process for preparation of isocyanate compounds June 22, 1999
An aliphatic diisocyanate compound is prepared in a high yield by reacting dimethyl carbonate with an aliphatic diamine in the presence of an alkali catalyst to produce a corresponding urethane compound; and, within 48 hours after the completion of the preparation of the urethane compoun
5789614 Process for preparation of aliphatic diisocyanate compounds August 4, 1998
An aliphatic diisocyante compound is prepared in a high yield by reacting dimethyl carbonate with an aliphatic diamine in the presence of an alkali catalyst to produce a corresponding urethene compound; and, within 48 hours after the completion of the preparation of the urethane compound
5774222 Manufacturing method of semiconductor substrative and method and apparatus for inspecting defect June 30, 1998
A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high y
5765372 Lean burn engine for automobile June 16, 1998
A lean burn engine adapted to establish a specified air-fuel ratio leaner by predetermined rate than a stoichiometric air-fuel ratio in a range of low engine speeds and low engine loads is provided with an air intake system of a low speed type which provides a high charging efficiency in
4378705 Reciprocating device April 5, 1983
A reciprocating device comprises an endless member such as a chain or a belt having a forward and a backward side spans and driven to circulate in one direction, a reciprocating member guided substantially parallel to both the forward and backward side spans of the endless member, engagi


 
 
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