| Patent Number |
Title Of Patent |
Date Issued |
| 7370764 |
Transport module |
May 13, 2008 |
| A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portion for supporting w |
| 6776289 |
Wafer container with minimal contact |
August 17, 2004 |
| A wafer carrier for transporting or holding wafers in a horizontal axially aligned arrangement has minimal four point regions of wafer support at the edge portion of the wafers. A preferred embodiment is an H-bar carrier with a plurality of slots defined by elongate wafer guides on the c |
| 6736268 |
Transport module |
May 18, 2004 |
| A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portion for supporting wafer |
| 6464081 |
Door guide for a wafer container |
October 15, 2002 |
| A semiconductor wafer carrier has an enclosure with a door frame defining an opening for insertion and removal of wafers, a door for closing and sealing said opening, and separately formed door guides for controlling the interface between said door and the enclosure. In a preferred e |
| 6206196 |
Door guide for a wafer container |
March 27, 2001 |
| A semiconductor wafer carrier has an enclosure with a door frame defining an opening for insertion and removal of wafers, a door for closing and sealing said opening, and separately formed door guides for controlling the interface between said door and the enclosure. In a preferred e |
| 6010008 |
Transport module |
January 4, 2000 |
| A module with an openable and closeable door has a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the module for supporting wafers. An advantage and feature of the invention is that |
| 5915562 |
Transport module with latching door |
June 29, 1999 |
| A wafer container has an open front defined by a door receiving frame and a door sized for the door receiving frame. The door receiving frame has slots on opposite sides and the door utilizes latching linkages and lifting linkages cooperate to extend, lift, lower and retract the latching |
| 5816410 |
Wafer cushions for wafer shipper |
October 6, 1998 |
| The present invention is a shipping container for safely storing articles such as semiconductor wafers. The shipping container has two sidewalls sealingly connected to two end walls to form a generally rectangular interior wafer confinement area. A top cover and a bottom cover are re |
| 5788082 |
Wafer carrier |
August 4, 1998 |
| A wafer container for transporting or holding wafers in a horizontal axially aligned arrangement has minimal four point regions of wafer support at the edge portion of the wafers. A preferred embodiment has a first container portion and a closeable door. The first container portion h |
| 5711427 |
Wafer carrier with door |
January 27, 1998 |
| A wafer container has an open front defined by a door frame and a door sized for the door frame. The door receiving frame has slots on opposite sides and the door utilizes latching portions that extend and retract from the edge portion of the door into and out of the slots for latching a |
| 5642813 |
Wafer shipper and package |
July 1, 1997 |
| A plastic container for storing and shipping semiconductor wafers comprising a wafer carrier of substantially rigid and transparent material supporting the wafers and maintaining the wafers in spaced relation to each other, top and bottom covers for the wafer carrier formed of stiff |
| 5586658 |
Wafer cushions for wafer shipper |
December 24, 1996 |
| A plastic container for handling, storing and shipping semiconductor wafers comprising a wafer carrier supporting the wafers and maintaining the wafers in spaced relation to each other, a plurality of rows of resiliently flexible tabs of progressively increasing and decreasing widths |
| 5575394 |
Wafer shipper and package |
November 19, 1996 |
| A plastic container for storing and shipping semiconductor wafers comprising a wafer carrier of substantially rigid and transparent material supporting the wafers and maintaining the wafers in spaced relation to each other, top and bottom covers for the wafer carrier formed of stiff |
| 5078004 |
Flow meter |
January 7, 1992 |
| The apparatus (10) includes a metering tube (18) and a sight tube (22) intersecting the metering tube (18). Fluid communication between a bore (68) formed axially in the sight tube (22) and a passage (38) in the metering tube (18) is provided through an orifice (64). Flow through the |
