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Jason J. New Patents |
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Inventor: New; Jason J.
Address: Allen, TX
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7241690 |
Method for conditioning a microelectronics device deposition chamber |
July 10, 2007 |
| The present invention provides, in one aspect, a method of conditioning a deposition chamber 100. An undercoat is placed on the walls of a deposition chamber 100 and a pre-deposition coat is deposited over the undercoat with a plasma gas mixture conducted at a high pressure and with |
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