| |
 |
Joachim Neutzel Patents |
|
Inventor: Neutzel; Joachim
Address: Fishkill, NY
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6984529 |
Fabrication process for a magnetic tunnel junction device |
January 10, 2006 |
| A method of fabricating a magnetic tunnel junction (MTJ) device is provided. A patterned hard mask is oxidized to form a surface oxide thereon. An MTJ stack is etched in alignment with the patterned hard mask after the oxidizing of the patterned hard mask. Preferably, the MTJ stack e |
|
|
|
