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Shunzou Nakagawa Patents |
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Inventor: Nakagawa; Shunzou
Address: Kanagawa, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6609540 |
Method and apparatus for supplying fluorine gas |
August 26, 2003 |
| A supplying method and a supplying apparatus for supplying fluorine gas, in which when a fluorine-occluding substance is used for the fluorine gas-generating means, a necessary amount of fluorine gas can be stably and swiftly supplied to have a uniform concentration to &a chamber of an |
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