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Koujiro Nagaoka Patents
Inventor:
Nagaoka; Koujiro
Address:
Kagoshima, JP
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
6329285 Plug fabricating method December 11, 2001
A plug fabricating method, capable of fabricating a minute plug with a good configuration, reducing scum and simplifying the plug fabricating process, makes an inter-layer insulating film on a Si substrate and forms a contact hole in the inter-layer insulating film. A direct contact laye


 
 
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