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Koujiro Nagaoka Patents |
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Inventor: Nagaoka; Koujiro
Address: Kagoshima, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6329285 |
Plug fabricating method |
December 11, 2001 |
| A plug fabricating method, capable of fabricating a minute plug with a good configuration, reducing scum and simplifying the plug fabricating process, makes an inter-layer insulating film on a Si substrate and forms a contact hole in the inter-layer insulating film. A direct contact laye |
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