| Patent Number |
Title Of Patent |
Date Issued |
| 6740170 |
Apparatus and method for cleaning peripheral part of substrate |
May 25, 2004 |
| A cleaning apparatus (9) for cleaning a peripheral part of a substrate holds a peripheral part of a substrate (1) between the elastic porous member (29) of an upper cleaning roller (16) and an elastic porous member (30) of a lower cleaning roller (17). The power of a drive motor (13) is |
| 5260174 |
Method and apparatus for forming a coating of a viscous liquid on an object |
November 9, 1993 |
| A relatively large-sized square substrate for use in the production of a color filter for liquid crystal display, a color image sensor or the like is applied with a coating film of a viscous liquid such as a photosensitive resin. For producing the coating film, the substrate is place |
| 5219615 |
Method and apparatus for forming a coating of a viscous liquid on an object |
June 15, 1993 |
| A relatively large-sized square substrate for use in the production of a color filter for liquid crystal display, a color image sensor or the like is applied with a coating film of a viscous liquid such as a photosensitive resin. For producing the coating film, the substrate is place |
| 5099782 |
Apparatus for forming a coating of a viscous liquid on an object |
March 31, 1992 |
| A relatively large-sized square substrate for use in the production of a color filter for liquid crystal display, a color image sensor or the like is applied with a coating film of a viscous liquid such as a photosensitive resin. For producing the coating film, the substrate is place |
