| Patent Number |
Title Of Patent |
Date Issued |
| RE38054 |
Reliable, modular, production quality narrow-band high rep rate F2 laser |
April 1, 2003 |
| The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator |
| 7346093 |
DUV light source optical element improvements |
March 18, 2008 |
| A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least |
| 7339973 |
Electrodes for fluorine gas discharge lasers |
March 4, 2008 |
| Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted |
| 7301980 |
Halogen gas discharge laser electrodes |
November 27, 2007 |
| A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric discharge between the |
| 7230965 |
Anodes for fluorine gas discharge lasers |
June 12, 2007 |
| Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in |
| 7190708 |
Annealed copper alloy electrodes for fluorine containing gas discharge lasers |
March 13, 2007 |
| An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them after the electrodes are machined. This annealing relieves the surface stress caused by the |
| 7132123 |
High rep-rate laser with improved electrodes |
November 7, 2006 |
| The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a fir |
| 7095774 |
Cathodes for fluorine gas discharge lasers |
August 22, 2006 |
| A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine and a method for manufacturing an electrode is disclosed. The electrode may include a copper and copper alloy body having an upper curved region containing a discharge footprint |
| 7068697 |
Adjustable flow guide to accommodate electrode erosion in a gas discharge laser |
June 27, 2006 |
| A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A laserable gas may be provided together with a circulation system to flow the gas into a space |
| 7046713 |
Discharge laser with porous layer covering anode discharge surface |
May 16, 2006 |
| A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at |
| 7003012 |
Discharge laser with porous insulating layer covering anode discharge surface |
February 21, 2006 |
| A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at |
| 6937635 |
High rep-rate laser with improved electrodes |
August 30, 2005 |
| The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a fir |
| 6914927 |
Laser discharge chamber passivation by plasma |
July 5, 2005 |
| Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen containing gases. The oxygen |
| 6904073 |
High power deep ultraviolet laser with long life optics |
June 7, 2005 |
| The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems producing a high repetition rate high power output beam. The invention includes solutions to a surface damage problem discovered by Applicants on CaF.sub.2 optics |
| 6711202 |
Discharge laser with porous insulating layer covering anode discharge surface |
March 23, 2004 |
| A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at l |
| 6690706 |
High rep-rate laser with improved electrodes |
February 10, 2004 |
| The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a fir |
| 6654403 |
Flow shaping electrode with erosion pad for gas discharge laser |
November 25, 2003 |
| An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and a set of long life electrode structures. At least one of the electrode structures has an erosion pad and a cross section shape designed to provide in conjunction with other chamber structure |
| 6644324 |
Laser discharge chamber passivation by plasma |
November 11, 2003 |
| Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen containing gases. The oxygen |
| 6584132 |
Spinodal copper alloy electrodes |
June 24, 2003 |
| Electrodes comprised of spinodal copper alloys. Applicant's tests have shown erosion rates of these alloys under certain environmental conditions are a factor of 5 or more lower than erosion rates of similar prior art copper alloys. In one application, the erosion of spinodal electrodes |
| 6560263 |
Discharge laser having electrodes with sputter cavities and discharge peaks |
May 6, 2003 |
| A gas discharge laser having a laser chamber with two elongated electrode elements, each having a discharge section having an optimum array of discharge peaks and sputter cavities. The sputter cavities provide sputter metal ions to contribute to a plasma between the electrodes and suppor |
| 6529321 |
Protective overcoat for replicated diffraction gratings |
March 4, 2003 |
| An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin aluminum reflective surface may be cracked or have relatively thick grain boundaries containing o |
| 6511703 |
Protective overcoat for replicated diffraction gratings |
January 28, 2003 |
| An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin aluminum reflective surface may be cracked or have relatively thick grain boundaries containing o |
| 6466602 |
Gas discharge laser long life electrodes |
October 15, 2002 |
| A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosi |
| 6414979 |
Gas discharge laser with blade-dielectric electrode |
July 2, 2002 |
| A gas discharge laser having a laser chamber with two elongated erodable electrode elements, at least one of said electrode element having a generally blunt blade-shaped portion comprised of a material having high electrical conductivity with a flow shaping dielectric fairing positioned |
| 6363094 |
Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects |
March 26, 2002 |
| A long life laser chamber for a halogen containing gas discharge laser. In a preferred embodiment electrode erosion caused by excited fluorine (i.e., atomic fluorine and fluorine ions) is reduced by forcing the excited fluorine away from the discharge footprint of the electrodes. Preferr |
| 6330261 |
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser |
December 11, 2001 |
| The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber, a pulse power syst |
| 6314119 |
Excimer laser with pulse and beam multiplier |
November 6, 2001 |
| An excimer laser with optical pulse multiplication produced by separating a laser beam into a plurality of beams and multiplying the pulse rate in each beam. A pulse multiplier optical system receives the laser output beam and produces multiple output beams, each beam having a larger num |
| 6277079 |
Flashing earring heartbeat monitor |
August 21, 2001 |
| An earring that flashes in synchronism with the wearer's heartbeat. A pulsed IR LED/photocell combination is built into an earring along with a comparator and a visible light-emitting source. The comparator determines when the heart has beat from the variation in the signal from the |
| 6162495 |
Protective overcoat for replicated diffraction gratings |
December 19, 2000 |
| An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin aluminum reflective surface may be cracked or have relatively thick grain boundaries containing o |
| 6128323 |
Reliable modular production quality narrow-band high REP rate excimer laser |
October 3, 2000 |
| The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses at 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber; a pulse power system comprised of three mo |
| 6067311 |
Excimer laser with pulse multiplier |
May 23, 2000 |
| An excimer laser with optical pulse multiplication. A pulse multiplier optical system receives the laser output beam and produces a multiplier output beam having a larger number of pulses, each with substantially reduced intensity values as compared to the laser output beam. The present |
| 6058739 |
Long life fused silica ultraviolet optical elements |
May 9, 2000 |
| The present invention provides a process for substantially extending the useful life of fused silica elements used in high energy ultraviolet optical systems. The fused silica bulk material is pre-compacted by illuminating it with radiation prior to final mechanical fabrication and p |
| 6034978 |
Gas discharge laser with gas temperature control |
March 7, 2000 |
| A gas discharge laser with fast response gas temperature control to maintain laser gas temperature within desired limits during burst mode operation. Preferred embodiments include a passive temperature stabilizer having fins with surface areas exposed to flowing laser gas at least equal |
| 6018537 |
Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser |
January 25, 2000 |
| The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator |
| 6014397 |
Laser chamber incorporating ceramic insulators coated with dielectric material |
January 11, 2000 |
| A coated ceramic insulator in a laser chamber that is exposed to a gaseous environment where impurities in the ceramic insulator are prevented from detrimentally contaminating the laser chamber by a high-purity insulating coating. The insulating coating prevents chemical interactions bet |
| 5999318 |
Reflective overcoat for replicated diffraction gratings |
December 7, 1999 |
| An extra step for a conventional replica forming process for diffraction gratings used in lasers is described herein. Applicant has discovered that the deterioration of a replica diffraction grating, when used with intense laser light, is accelerated due to small quantities of the radiat |
| 5978409 |
Line narrowing apparatus with high transparency prism beam expander |
November 2, 1999 |
| A grating based line-narrowing apparatus having a prism beam expander with at least four prisms. Each prism is positioned at an incidence angle between 67 and 71 degrees. A single layer coating of high refractive index, robust material, such as Al.sub.2 O.sub.3, is applied to the hyp |
| 5126621 |
Ruggedized flashlamp exhibiting high average power and long life |
June 30, 1992 |
| A flashlamp provides a ruggedized yet simple-to-manufacture construction capable of operating at high average output power over a long life. The flashlamp construction includes a glass tube (12) with an electrode assembly (24) detachably secured to each end. The electrode assembly in |
| 4975918 |
Tunable laser |
December 4, 1990 |
| A tunable laser includes a laser medium (24), a resonant cavity (27, 28), at least one Faraday rotation element (26), and a polarization sensitive attenuator (25). Waves of laser energy produced by the laser medium resonate in the resonant cavity between a 100% reflective surface (27) an |
| 4897726 |
Method and apparatus for interacting with television images |
January 30, 1990 |
| Apparatus for use with a standard television (TV) receiver for superimposing information or images over portions of the broadcast scene. Synchronization signals are generated by locking onto the horizontal sweep electromagnetic interference (EMI) generated by all television receivers. |
| 4868768 |
Optical absorption measurement system |
September 19, 1989 |
| The system of the present invention contemplates a non-intrusive method for measuring the temperature rise of optical elements under high laser power optical loading to determine the absorption coefficient. The method comprises irradiating the optical element with a high average power la |
| 4739406 |
Method and apparatus for interacting with television images |
April 19, 1988 |
| Apparatus for use with a standard television (TV) receiver for superimposing information or images over portions of the broadcast scene. Scynchronization signals are generated by locking onto the horizontal sweep electromagnetic interference (EMI) generated by all television receiver |
| 4423511 |
Unstable waveguide laser resonator |
December 27, 1983 |
| A hybrid laser resonator for use with a transverse flow waveguide laser includes cylindrical optical elements for coupling together regions of a thin slab-shaped laser medium operating in the waveguide mode through a set of reflectors which define the ends of the laser cavity. Separate |
| 4325006 |
High pulse repetition rate coaxial flashlamp |
April 13, 1982 |
| A coaxial flashlamp for pulsed operation at high repetition rates having an annular, light emitting discharge path between fluid cooled coaxially disposed, inner and outer optically transparent tubes. Electrodes are provided at opposite ends of the discharge paths and a gas such as Xenon |
| 4289397 |
Laser ceilometer signal processing means |
September 15, 1981 |
| For use in a pulsed-laser lidar such as a laser ceilometer, there are shown several examples of signal processing means for separating desired pulses due to targets such as clouds from strong background signals due to suspended particles causing poor visibility. The several examples belo |
| 4178565 |
Fluid laser flow channel liner |
December 11, 1979 |
| A fluid laser having a flow channel between fluid inlet and active lasing region which reduces medium heating and resulting medium disturbances. The channel includes a thin optically transparent, thermally insulating layer directly bordering the medium. The thin layer rests upon a metall |
| 4176324 |
High performance dye laser and flow channel therefor |
November 27, 1979 |
| A flow channel for a dye laser having means for reducing thermal and pressure variations in the flowing laser medium particularly in the vicinity of active lasing in order to permit high power and high pulse rate lasing with a high quality, low divergence output beam. Pressure distur |
