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Richard C. Morton Patents |
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Inventor: Morton; Richard C.
Address: San Diego, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6963595 |
Automatic gas control system for a gas discharge laser |
November 8, 2005 |
| An automatic F.sub.2 laser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the F.sub.2 consumption rates through the operating life of the laser system. These consumption |
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