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Harold Mortensen Patents |
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Inventor: Mortensen; Harold
Address: Carlsbad, CA
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6616767 |
High temperature ceramic heater assembly with RF capability |
September 9, 2003 |
| The present invention provides techniques for coupling radio-frequency (RF) power to a metal plate in a ceramic pedestal. Perforations in the metal plate allow ceramic-to-ceramic bonding through the metal plate. The power from an RF power feed is distributed to the perforated metal plate |
| 5968379 |
High temperature ceramic heater assembly with RF capability and related methods |
October 19, 1999 |
| The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 .ANG./minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated |
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