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Osamu Miyagawa Patents |
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Inventor: Miyagawa; Osamu
Address: Yokkaichi, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7312158 |
Method of forming pattern |
December 25, 2007 |
| A method of forming a pattern, including forming first and second films, and a resist film on the second film, patterning the resist film to form a first pattern, etching the first pattern to narrow a width of the lines of the first pattern, etching the second film by using the first pat |
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