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Teng Ge Ma Patents |
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Inventor: Ma; Teng Ge
Address: Beijing, CN
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 4794217 |
Induction system for rapid heat treatment of semiconductor wafers |
December 27, 1988 |
| A semiconductor wafer is transported by a mechanical system into or out of a quartz housing filled with a protection gas. The wafer is placed between and spaced apart from two graphite plates. A RF induction coil surrounding the quartz housing is used to heat the graphite plates. Radiati |
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