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Suk B. Ma Patents |
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Inventor: Ma; Suk B.
Address: Seoul, KR
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5344796 |
Method for making polycrystalline silicon thin film |
September 6, 1994 |
| A method for making a polycrystalline silicon thin film by crystallizing an amorphous silicon thin film at a low temperature of 500.degree. C. to 600.degree. C. Over a glass substrate is deposited a microcrystalline silicon seed layer having a thickness of 100 .ANG. to 500 .ANG., usin |
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