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Michael Kiene Patents |
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Inventor: Kiene; Michael
Address: Radebeul, DE
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7022602 |
Nitrogen-enriched low-k barrier layer for a copper metallization layer |
April 4, 2006 |
| The effect of resist poisoning may be eliminated or at least substantially reduced in the formation of a low-k metallization layer, in that a nitrogen-containing barrier layer is provided with a surface modified by plasma treatment. Consequently, diffusion of nitrogen and nitrogen co |
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