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Masataka Kado Patents
Inventor:
Kado; Masataka
Address:
Orlando, FL
No. of patents:
2
Patents:




Patent Number Title Of Patent Date Issued
5577091 Water laser plasma x-ray point sources November 19, 1996
A high repetition-rate laser plasma target source system wherein ice crystals are irradiated by a laser and lithography system. The target source system comprises in a preferred embodiment a liquid tank source and freezer means which freezes microscopic particles into crystal shapes
5459771 Water laser plasma x-ray point source and apparatus October 17, 1995
A high repetition-rate laser plasma target source system and lithography system is disclosed. The target source system comprises in a preferred embodiment a liquid tank source and freezer which freezes microscopic particles into crystal shapes which are projected by a nozzle jet from a


 
 
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