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Hiromichi Isogai Patents |
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Inventor: Isogai; Hiromichi
Address: Shibata, JP
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7149341 |
Wafer inspection apparatus |
December 12, 2006 |
| A wafer inspection apparatus has a supporting means (10) for rotatably supporting a wafer (W) formed of a disk, a circumferential edge imaging means (40) for imaging a circumferential edge (S) of the wafer (W) that is supported by the supporting means for rotation, a notch imaging means |
| 6976908 |
Polishing head and polishing apparatus |
December 20, 2005 |
| A polishing head includes a head body, a first recessed portion formed in the lower surface of the head body, a support plate which can be moved up and down in the first recessed portion, a first film-like member in which a first space is formed between the upper surface of the support p |
| 6668662 |
Viscoelasticity measuring device |
December 30, 2003 |
| The invention provides a viscoelasticity measuring device which is capable of imparting a desired displacement profile to a sample under conditions close to that of actual use. The viscoelasticity measuring device is composed of a presser to impart displacements to a sample; a rod to con |
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