| |
 |
Lin I Patents |
|
Inventor: I; Lin
Address: Piermont, NY
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 4581118 |
Shaped field magnetron electrode |
April 8, 1986 |
| A substrate support electrode for use in plasma processing equipment has a book-shaped prismatic body containing a magnet core with flange-like pole pieces at each end to provide a longitudinal magnetic field wrapped around the electrode body. An auxiliary field-shaping magnet spaced fro |
|
|
|
