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Chih-Sheng Hu Patents |
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Inventor: Hu; Chih-Sheng
Address: Hsinchu, TW
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6357280 |
Leakage testing tool for a bellow of a semiconductor manufacturing machine |
March 19, 2002 |
| The invention is a leakage testing tool for a bellow of a semiconductor manufacturing machine. The testing tool has a plate, a first rack and an opposite second rack, both racks formed on the plate and supporting the bellow. Two movable plates each engage with a respective one of two |
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